TY - GEN
T1 - Design and simulation of high-frequency (>100 MHz) ultrasonic phased array transducer
AU - Zhang, Jin Ying
AU - Xu, Wei Jiang
AU - Ji, Xin Ming
AU - Carlier, Julien
AU - Nongaillard, Bertrand
AU - Huang, Yi Ping
PY - 2010
Y1 - 2010
N2 - This paper presents a theoretical study on the possible realization of high frequency ultrasonic phased array transducer (f>100 MHz) using MEMS technologies. A silicon based lithium niobate (LiNbO3) single crystal linear array is considered. Finite element method is employed for the simulation optimization design of such device. Continuous wave beam steering, focusing under different array and matching conditions are simulated and the beam performance is analyzed. The inter-element cross-talking and the element electrical impedance are also calculated.
AB - This paper presents a theoretical study on the possible realization of high frequency ultrasonic phased array transducer (f>100 MHz) using MEMS technologies. A silicon based lithium niobate (LiNbO3) single crystal linear array is considered. Finite element method is employed for the simulation optimization design of such device. Continuous wave beam steering, focusing under different array and matching conditions are simulated and the beam performance is analyzed. The inter-element cross-talking and the element electrical impedance are also calculated.
UR - https://www.scopus.com/pages/publications/78751510240
U2 - 10.1109/ICSICT.2010.5667588
DO - 10.1109/ICSICT.2010.5667588
M3 - Conference contribution
AN - SCOPUS:78751510240
SN - 9781424457984
T3 - ICSICT-2010 - 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology, Proceedings
SP - 1422
EP - 1424
BT - ICSICT-2010 - 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology, Proceedings
T2 - 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology
Y2 - 1 November 2010 through 4 November 2010
ER -