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Design and Implementation of a Technique for Iterative Magnetorheological Jet Polishing

  • Pak yin Adam Li
  • , Ming fu Melvin Cheung
  • , Hang Tong
  • , Haobo Cheng
  • , Yeung Yam
  • Chinese University of Hong Kong

科研成果: 期刊稿件 › 文章 › 同行评审

摘要

This article introduces a technique for iterative high precision freeform lens polishing, with operations alternating between a fabrication and a measurement unit. The technique is implemented using a Magnetorheological Jet Polishing (MJP) machine as fabrication unit, and a sub-aperture stitching interferometric system as measurement unit. The two units are separately located and have different internal coordinate references. Precision integration of the two is the key to realize high performance iterative polishing. In our study, application of the proposed technique yields a peak to valley (PV) value of 1/7λ in polishing flat optical elements.

源语言英语
页(从-至)195-205
页数11
期刊International Journal of Optomechatronics
卷8
期3
DOI
出版状态已出版 - 7月 2014
已对外发布是

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