摘要
By electrolysis of the methanol solution, an attempt was made to deposit diamondlike carbon (DLC) films on silicon substrate at temperature of less than 60°C. Substrates were negatively biased with a dc potential of 0 to -3000 V. IR spectra showed that the O-H, C-H, and C-O vibration bands of electrolyte decreased remarkably after electrolysis and a new peak characterized as the C = C bond appeared. The deposited films were characterized as DLC films by Raman spectroscopy.
| 源语言 | 英语 |
|---|---|
| 页(从-至) | 1074-1076 |
| 页数 | 3 |
| 期刊 | Applied Physics Letters |
| 卷 | 69 |
| 期 | 8 |
| DOI | |
| 出版状态 | 已出版 - 19 8月 1996 |
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