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Deposition of diamond-like carbon films by electrolysis of methanol solution

  • Hao Wang*
  • , Ming Rong Shen
  • , Zhao Yuan Ning
  • , Chao Ye
  • , Chuan Bao Cao
  • , Hai Yan Dang
  • , He Sun Zhu
  • *此作品的通讯作者
  • Soochow University
  • Beijing Institute of Technology

科研成果: 期刊稿件文章同行评审

摘要

By electrolysis of the methanol solution, an attempt was made to deposit diamondlike carbon (DLC) films on silicon substrate at temperature of less than 60°C. Substrates were negatively biased with a dc potential of 0 to -3000 V. IR spectra showed that the O-H, C-H, and C-O vibration bands of electrolyte decreased remarkably after electrolysis and a new peak characterized as the C = C bond appeared. The deposited films were characterized as DLC films by Raman spectroscopy.

源语言英语
页(从-至)1074-1076
页数3
期刊Applied Physics Letters
69
8
DOI
出版状态已出版 - 19 8月 1996

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