CMOS MEMS Fabrication Technologies

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源语言	英语
主期刊名	Encyclopedia of Nanotechnology
出版商	Springer Netherlands
页	540-549
页数	10
ISBN（电子版）	9789401797801
ISBN（印刷版）	9789401797795
DOI	https://doi.org/10.1007/978-94-017-9780-1_310
出版状态	已出版 - 1 1月 2016
已对外发布	是

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title = "CMOS MEMS Fabrication Technologies",

author = "Hongwei Qu and Huikai Xie",

year = "2016",

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AU - Xie, Huikai

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