CMOS-compatible high-Q micro-electro-mechanical system suspended on-chip spiral inductor

A COMS-compatible high Q-factor suspended on-chip spiral inductor used in the radio frequency front-end of radio fuze is designed and fabricated using the micro-electro-mechanical system (MEMS) surface-micromachining technology. The fabrication process of inductor is compatible with CMOS in the aspects of both thermal budget and materials. The loss factors of on-chip spiral inductor are reduced by using a suspended copper coil, and the Q-factor is significantly improved. The improved inductor model is analyzed by the electromagnetic finite element analysis software HFSS. The MEMS suspended on-chip inductor is measured. The measurement results show that the Q-factor of inductor is more than 20 in the frequency range of 1~7.6 GHz and reaches 38 at 7.4 GHz.