Calibrating the ZYGO Interferometer Through the Internet

Calibrating instrument through the Internet is a new trend in measurement field. The significances of this technology are it's efficiency and the potential to shorten the traceability chain to a single link with national measurement standards. In this paper, we will summarize the research and developments by some developed countries In recent years, and analyze the basic implementing model. As an example, this paper also presents detailedly our Internet Calibrating practice aim at ZYGO interferorneter(model: GPI-XP-IV). Our research includes three main parts: the design of transmission standard calibrating and testing ZYGO interferometer through network the network database system. Lastly, we analyze concisely the relevant technology in implementation such as network time synchronization network security.