C 1s photoemission investigation of substrate bias and annealing temperature influencing the microstructure of amorphous diamond films

J. Zhu; C. Jiang; J. Han; J. Liang

doi:10.1007/s00339-007-4094-6

C 1s photoemission investigation of substrate bias and annealing temperature influencing the microstructure of amorphous diamond films

J. Zhu^*
, C. Jiang
, J. Han
, J. Liang

^*此作品的通讯作者

Harbin Institute of Technology

科研成果: 期刊稿件 › 文章 › 同行评审

2 引用（Scopus）

摘要

The hybridization composition of amorphous diamond films deposited using a filtered arc has been investigated as functions of the substrate bias and the annealing temperature by the deconvolution of C 1s photoemission spectra. The chemical shift and the half width of the entire C 1s spectrum have demonstrated the clear regularities to the changing bias and temperature. The XPS C 1s core level spectra can provide a powerful way to follow the evolution of the sp ³ bonding configurations.

源语言	英语
页（从-至）	497-501
页数	5
期刊	Applied Physics A: Materials Science and Processing
卷	89
期	2
DOI	https://doi.org/10.1007/s00339-007-4094-6
出版状态	已出版 - 11月 2007
已对外发布	是

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abstract = "The hybridization composition of amorphous diamond films deposited using a filtered arc has been investigated as functions of the substrate bias and the annealing temperature by the deconvolution of C 1s photoemission spectra. The chemical shift and the half width of the entire C 1s spectrum have demonstrated the clear regularities to the changing bias and temperature. The XPS C 1s core level spectra can provide a powerful way to follow the evolution of the sp 3 bonding configurations.",

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AB - The hybridization composition of amorphous diamond films deposited using a filtered arc has been investigated as functions of the substrate bias and the annealing temperature by the deconvolution of C 1s photoemission spectra. The chemical shift and the half width of the entire C 1s spectrum have demonstrated the clear regularities to the changing bias and temperature. The XPS C 1s core level spectra can provide a powerful way to follow the evolution of the sp 3 bonding configurations.

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C 1s photoemission investigation of substrate bias and annealing temperature influencing the microstructure of amorphous diamond films

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