@inproceedings{4624ef8063b8439b849e17fa97f21a4e,
title = "Aqueous imaging by SEM-CT system inside environmental-SEM",
abstract = "This paper presents (he aqueous observation of three-dimensional internal information using scanning election microscope- computed tomography (SEM-CT) inside an environ mental-SEM (E-SEM). For this purpose, it Is required to control the sample temperature by controlling sampk' duimhiT pressure of the E-SEM. In this paper, a cooling system was installed into the SEM-CT system to decrease the sample temperature. 1 he aqueous observation was confirmed by the E-SEM and SEM-CT observations using sodium poh/acrylate particles as a sample.",
keywords = "Computed Tomography, Environmental-SEM, Nanomanipulation, SEM-CT, Scanning Electron Microscope",
author = "Masahiro Nakajima and Masaru Takeuchi and Kouya Shimazaki and Naoki Hisamoto and Yasuhisa Hasegawa and Toshio Fukuda and Qiang Huang",
note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 15th IEEE International Conference on Nanotechnology, IEEE-NANO 2015 ; Conference date: 27-07-2015 Through 30-07-2015",
year = "2015",
doi = "10.1109/NANO.2015.7388753",
language = "English",
series = "IEEE-NANO 2015 - 15th International Conference on Nanotechnology",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "85--88",
booktitle = "IEEE-NANO 2015 - 15th International Conference on Nanotechnology",
address = "United States",
}