@inproceedings{8d1f2a6642c24950b09ebb07d9e23f5f,
title = "Application and development of MEMS in the field of aerospace",
abstract = "This paper briefly introduced the concept and technology of MEMS. It analyzed the applications of MEMS units, MEMS sensors in the field of aerospace. The importance and unique advantages of MEMS technology play an irreplaceable role in high-tech industries. Finally, this paper discussed the development of MEMS and provided direction for further study of MEMS technology.",
keywords = "Aerospace, MEMS, MEMS sensor, MEMS unit",
author = "Wang, \{Jie Xuan\} and Qian, \{Xin Ming\}",
note = "Publisher Copyright: {\textcopyright} (2014) Trans Tech Publications, Switzerland.; 2nd Asian Pacific Conference on Mechatronics and Control Engineering, APCMCE 2014 ; Conference date: 08-08-2014 Through 09-08-2014",
year = "2014",
doi = "10.4028/www.scientific.net/AMM.643.72",
language = "English",
series = "Applied Mechanics and Materials",
publisher = "Trans Tech Publications Ltd.",
pages = "72--76",
editor = "Wen Jin",
booktitle = "Engineering Providing of Industrial Development",
address = "Switzerland",
}