@inproceedings{d2ec843b4565407fa3d019080dd2e50e,
title = "Analysis on morphological and structural features of graphene layers by using polarization indirect microscopic imaging system",
abstract = "Simple polarization indirect microscopic imaging can visualize graphene layer's dimensions features, however, its limited resolution makes it impossible to analyze the other physical characteristics. Our research uses polarization parameter indirect microscopic imaging system with super-resolution to modulate the variation of far field point spread function with varying polarization status and improve wavefront aberration, sensor error, and polarization angle. This method has much higher sensitivity to graphene overlapping layers, edges, wrinkles and grain boundaries. Finally, this technique for graphene inspection that is capable of reaching super-resolution.",
keywords = "Indirect imaging, graphene layers, super resolution",
author = "Guoyan Liu and Kun Gao and Guoqiang Ni and Xuefeng Liu",
note = "Publisher Copyright: {\textcopyright} 2015 SPIE.; 2015 International Conference on Optical Instruments and Technology: Micro/Nano Photonics and Fabrication, OIT 2015 ; Conference date: 17-05-2015 Through 19-05-2015",
year = "2015",
doi = "10.1117/12.2195263",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Pavel Cheben and Zhiping Zhou and Changhe Zhou",
booktitle = "2015 International Conference on Optical Instruments and Technology",
address = "United States",
}