@inproceedings{64574c1a4b784dc28e966cb07370b558,
title = "An Integrated CMOS Mems Gas Flow Sensor with Detection Limit Towards Micrometer per Second",
abstract = "We report an integrated Thermoresistive Micro Calorimetric Flow (TMCF) sensor with the detection limit towards mumathrm\{m\}/mathrm\{s\} level by using proprietary InvenSense CMOS MEMS technology. The TMCF sensor shows a prominent normalized sensitivity of 533mu mathrm\{V\}/(mathrm\{m\}/mathrm\{s\})/mathrm\{mW\} for N2 flow (-1.29m/s∼1.29m/s). With the very low flow testing in the mixed convection regime (Gr/Re-\{2\} > 1), the TMCF sensor shows a good resolution of less than 3.2mm/s and Minimum Detectable Flow Velocity (MDFV) of less than 1.6mm/s (2\% error). Moreover, the intrinsic MDFV and resolution of the TMCF sensor to the noise level at the zero flow is determined as good as 30mu mathrm\{m\}/mathrm\{s\} and 60mu mathrm\{m\}/mathrm\{s\}, respectively. Therefore, this proposed TMCF sensor will be a promising flow device for ultra-low fluid flow measurements in micro/nanofluidics.",
keywords = "CMOS MEMS, micro flow sensor, minimum detectable flow velocity, thermoresistive",
author = "Wei Xu and Xiaoyi Wang and Xiaojin Zhao and Zongqin Ke and Lee, \{Yi Kuen\}",
note = "Publisher Copyright: {\textcopyright} 2020 IEEE.; 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 ; Conference date: 18-01-2020 Through 22-01-2020",
year = "2020",
month = jan,
doi = "10.1109/MEMS46641.2020.9056392",
language = "English",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "200--203",
booktitle = "33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020",
address = "United States",
}