An instrument for measuring flatness by using laser and CCD

Qun Hao; Mang Cao; Dacheng Li

doi:10.1117/12.256203

An instrument for measuring flatness by using laser and CCD

Qun Hao
, Mang Cao
, Dacheng Li

Tsinghua University

科研成果: 期刊稿件 › 会议文章 › 同行评审

1 引用（Scopus）

摘要

In this paper, an instrument for measuring flatness derivation by using an aligned laser beam and CCD detector is described. A stable aligned laser beam is used to form a datum plane in the instrument by rotating shaft and a pentagonal prism. Using a linear array CCD detector as the sensing probe, the system can detect the deviation of height related to the datum plane directly and absolutely. The experiment result shows that the measurement accuracy of the instrument is 2.3×1^-6

源语言	英语
页（从-至）	183-186
页数	4
期刊	Proceedings of SPIE - The International Society for Optical Engineering
卷	2862
DOI	https://doi.org/10.1117/12.256203
出版状态	已出版 - 4 11月 1996
已对外发布	是
活动	Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays 1996 - Denver, 美国期限: 4 8月 1996 → 9 8月 1996

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title = "An instrument for measuring flatness by using laser and CCD",

abstract = "In this paper, an instrument for measuring flatness derivation by using an aligned laser beam and CCD detector is described. A stable aligned laser beam is used to form a datum plane in the instrument by rotating shaft and a pentagonal prism. Using a linear array CCD detector as the sensing probe, the system can detect the deviation of height related to the datum plane directly and absolutely. The experiment result shows that the measurement accuracy of the instrument is 2.3{\texttimes}1-6",

keywords = "CCD detector, Flatness, Laser beam",

author = "Qun Hao and Mang Cao and Dacheng Li",

note = "Publisher Copyright: {\textcopyright} 1996 SPIE. All rights reserved.; Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays 1996 ; Conference date: 04-08-1996 Through 09-08-1996",

year = "1996",

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doi = "10.1117/12.256203",

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TY - JOUR

T1 - An instrument for measuring flatness by using laser and CCD

AU - Hao, Qun

AU - Cao, Mang

AU - Li, Dacheng

PY - 1996/11/4

Y1 - 1996/11/4

N2 - In this paper, an instrument for measuring flatness derivation by using an aligned laser beam and CCD detector is described. A stable aligned laser beam is used to form a datum plane in the instrument by rotating shaft and a pentagonal prism. Using a linear array CCD detector as the sensing probe, the system can detect the deviation of height related to the datum plane directly and absolutely. The experiment result shows that the measurement accuracy of the instrument is 2.3×1-6

AB - In this paper, an instrument for measuring flatness derivation by using an aligned laser beam and CCD detector is described. A stable aligned laser beam is used to form a datum plane in the instrument by rotating shaft and a pentagonal prism. Using a linear array CCD detector as the sensing probe, the system can detect the deviation of height related to the datum plane directly and absolutely. The experiment result shows that the measurement accuracy of the instrument is 2.3×1-6

KW - CCD detector

KW - Flatness

KW - Laser beam

UR - https://www.scopus.com/pages/publications/57549105965

U2 - 10.1117/12.256203

DO - 10.1117/12.256203

M3 - Conference article

AN - SCOPUS:57549105965

SN - 0277-786X

VL - 2862

SP - 183

EP - 186

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays 1996

Y2 - 4 August 1996 through 9 August 1996

ER -

An instrument for measuring flatness by using laser and CCD

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