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An Improved Power-efficiency Microshutter Array with Thermal Isolation for Lighting Control

  • Beijing Institute of Technology
  • City University of Hong Kong

科研成果: 书/报告/会议事项章节会议稿件同行评审

摘要

Electrothermally-actuated microshutters suffer from high power consumption. In this study, an electrothermal microshutter array with Polyimide filled thermal isolation trenches is proposed to improve actuation power efficiency. The microshutter array has an optical aperture of 20×20 mm2 and the power consumption is 9.1

源语言英语
主期刊名2024 International Conference on Optical MEMS and Nanophotonics, OMN 2024
出版商IEEE Computer Society
ISBN(电子版)9798350384925
DOI
出版状态已出版 - 2024
活动2024 International Conference on Optical MEMS and Nanophotonics, OMN 2024 - San Sebastian, 西班牙
期限: 28 7月 20241 8月 2024

出版系列

姓名International Conference on Optical MEMS and Nanophotonics
ISSN(印刷版)2160-5033
ISSN(电子版)2160-5041

会议

会议2024 International Conference on Optical MEMS and Nanophotonics, OMN 2024
国家/地区西班牙
San Sebastian
时期28/07/241/08/24

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