An electrothermal/electrostatic dual driven MEMS scanner with large in-plane and out-of-plane displacement

Xiaoyang Zhang, Lin Liu, Wenxuan Liang, Xingde Li, Huikai Xie

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

6 引用 （Scopus）

指纹

探究 'An electrothermal/electrostatic dual driven MEMS scanner with large in-plane and out-of-plane displacement' 的科研主题。它们共同构成独一无二的指纹。

Engineering

Material Science