TY - GEN
T1 - An electrothermal SCS micromirror for large Bi-directional 2-D scanning
AU - Jain, Ankur
AU - Xie, Huikai
PY - 2005
Y1 - 2005
N2 - This paper reports the design, fabrication and operation of a two-dimensional (2-D) micromirror that can generate large bi-directional scans at low actuation voltages. The micromirror device has been fabricated by using a unique DRIE CMOS-MEMS process that can simultaneously provide thin-film and single-crystal silicon microstructures. A fabricated micromirror has negligible initial tilt angle, and can perform large bi-directional 2-D optical scans (over ±30°) at less than 12 Vdc. 2-D scanning using this mirror has been demonstrated by obtaining a 14° by 50° angular raster scan pattern.
AB - This paper reports the design, fabrication and operation of a two-dimensional (2-D) micromirror that can generate large bi-directional scans at low actuation voltages. The micromirror device has been fabricated by using a unique DRIE CMOS-MEMS process that can simultaneously provide thin-film and single-crystal silicon microstructures. A fabricated micromirror has negligible initial tilt angle, and can perform large bi-directional 2-D optical scans (over ±30°) at less than 12 Vdc. 2-D scanning using this mirror has been demonstrated by obtaining a 14° by 50° angular raster scan pattern.
KW - Bi-directional scanning
KW - Large rotation angle
KW - Optical scanner
KW - Two-dimensional (2-D) mirror
UR - https://www.scopus.com/pages/publications/27544457846
M3 - Conference contribution
AN - SCOPUS:27544457846
SN - 0780389948
T3 - Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
SP - 988
EP - 991
BT - TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
T2 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Y2 - 5 June 2005 through 9 June 2005
ER -