@inproceedings{a2b9b6c6fee648caa33cda7b7287acb5,
title = "An Electrothermal Micromirror with J-shaped Bimorph Microactuators",
abstract = "A tip-Tilt-piston micromirror with four J-shaped bimorph microactuators is developed to increase robustness and stability. The diameter of the central mirror plate is 1 mm and the footprint of the entire device is only 1.6 {\texttimes} 1.6 mm2. The micromirror scans 3° (optical) at 2.8 Vdc. The piston mode and rotation mode are measured at 880 Hz and 1555 Hz, respectively.",
keywords = "J-shaped bimorph, electrothermal actuation, micromirror",
author = "Liang Zhou and Dingkang Wang and Huikai Xie",
note = "Publisher Copyright: {\textcopyright} 2019 IEEE.; 2019 International Conference on Optical MEMS and Nanophotonics, OMN 2019 ; Conference date: 28-07-2019 Through 01-08-2019",
year = "2019",
month = jul,
doi = "10.1109/OMN.2019.8925056",
language = "English",
series = "International Conference on Optical MEMS and Nanophotonics",
publisher = "IEEE Computer Society",
pages = "226--227",
booktitle = "OMN 2019 - 2019 International Conference on Optical MEMS and Nanophotonics, Proceedings",
address = "United States",
}