An ALN-Based Piezoelectric Micromirror with Four-Degree-of-Freedom Motion

Hao Chen; Xudong Ma; Yaoyu Deng; Xinyu Ding; Ke Cao; Hui Shang; Wenlong Jiao; Huikai Xie

doi:10.1109/MEMS64181.2026.11419572

An ALN-Based Piezoelectric Micromirror with Four-Degree-of-Freedom Motion

Hao Chen
, Xudong Ma
, Yaoyu Deng
, Xinyu Ding
, Ke Cao
, Hui Shang
, Wenlong Jiao
, Huikai Xie^*

^*此作品的通讯作者

Beijing Institute of Technology
Ministry of Education in China

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

摘要

In this paper, we report the design, fabrication, and characterization of a micromirror capable of four-degree-of-freedom (DOF) motion, i.e., tip, tilt. piston (TTP) and mirror curvature tuning, all generated by piezoelectric actuation. The mirror plate has an optical aperture of 1.0 mm2 and its radius of curvature changes from 10.98 mm-1 to 12.28 mm-1 under a DC bias voltage of ± 50 V. The measured first three resonant modes are located at 1.680 kHz (piston), 2.611 kHz (tip), and 2.660 kHz (tilt), respectively. Under a driving voltage of 40 Vpp, the optical scanning angle and vertical displacement of the mirror plate can reach 13.0° (tilt) at 2.660 kHz and 48 μ m at 1.680 kHz, respectively. This design has promising applications in various compact optical systems.

源语言	英语
主期刊名	2026 IEEE 39th International Conference on Micro Electro Mechanical Systems, MEMS 2026
出版商	Institute of Electrical and Electronics Engineers Inc.
页	867-870
页数	4
ISBN（电子版）	9798331572518
DOI	https://doi.org/10.1109/MEMS64181.2026.11419572
出版状态	已出版 - 2026
已对外发布	是
活动	39th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2026 - Salzburg, 奥地利期限: 25 1月 2026 → 29 1月 2026

出版系列

姓名	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN（印刷版）	1084-6999

会议

会议	39th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2026
国家/地区	奥地利
市	Salzburg
时期	25/01/26 → 29/01/26

访问文件

10.1109/MEMS64181.2026.11419572

其它文件与链接

链接到 Scopus 的出版物

引用此

Chen, H., Ma, X., Deng, Y., Ding, X., Cao, K., Shang, H., Jiao, W., & Xie, H. (2026). An ALN-Based Piezoelectric Micromirror with Four-Degree-of-Freedom Motion. 在 2026 IEEE 39th International Conference on Micro Electro Mechanical Systems, MEMS 2026 (页码 867-870). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMS64181.2026.11419572

Chen, Hao ; Ma, Xudong ; Deng, Yaoyu 等. / An ALN-Based Piezoelectric Micromirror with Four-Degree-of-Freedom Motion. 2026 IEEE 39th International Conference on Micro Electro Mechanical Systems, MEMS 2026. Institute of Electrical and Electronics Engineers Inc., 2026. 页码 867-870 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{6b677986ac9d470588c191bb01942e10,

title = "An ALN-Based Piezoelectric Micromirror with Four-Degree-of-Freedom Motion",

abstract = "In this paper, we report the design, fabrication, and characterization of a micromirror capable of four-degree-of-freedom (DOF) motion, i.e., tip, tilt. piston (TTP) and mirror curvature tuning, all generated by piezoelectric actuation. The mirror plate has an optical aperture of 1.0 mm2 and its radius of curvature changes from 10.98 mm-1 to 12.28 mm-1 under a DC bias voltage of ± 50 V. The measured first three resonant modes are located at 1.680 kHz (piston), 2.611 kHz (tip), and 2.660 kHz (tilt), respectively. Under a driving voltage of 40 Vpp, the optical scanning angle and vertical displacement of the mirror plate can reach 13.0° (tilt) at 2.660 kHz and 48 μ m at 1.680 kHz, respectively. This design has promising applications in various compact optical systems.",

keywords = "MEMS mirror, MEMS scanner, focus-tunable, piezoelectric actuator, thin film AIN",

author = "Hao Chen and Xudong Ma and Yaoyu Deng and Xinyu Ding and Ke Cao and Hui Shang and Wenlong Jiao and Huikai Xie",

note = "Publisher Copyright: {\textcopyright} 2026 IEEE.; 39th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2026 ; Conference date: 25-01-2026 Through 29-01-2026",

year = "2026",

doi = "10.1109/MEMS64181.2026.11419572",

language = "English",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "867--870",

booktitle = "2026 IEEE 39th International Conference on Micro Electro Mechanical Systems, MEMS 2026",

address = "United States",

}

Chen, H, Ma, X, Deng, Y, Ding, X, Cao, K, Shang, H, Jiao, W & Xie, H 2026, An ALN-Based Piezoelectric Micromirror with Four-Degree-of-Freedom Motion. 在 2026 IEEE 39th International Conference on Micro Electro Mechanical Systems, MEMS 2026. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Institute of Electrical and Electronics Engineers Inc., 页码 867-870, 39th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2026, Salzburg, 奥地利, 25/01/26. https://doi.org/10.1109/MEMS64181.2026.11419572

An ALN-Based Piezoelectric Micromirror with Four-Degree-of-Freedom Motion. / Chen, Hao; Ma, Xudong; Deng, Yaoyu 等.
2026 IEEE 39th International Conference on Micro Electro Mechanical Systems, MEMS 2026. Institute of Electrical and Electronics Engineers Inc., 2026. 页码 867-870 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

TY - GEN

T1 - An ALN-Based Piezoelectric Micromirror with Four-Degree-of-Freedom Motion

AU - Chen, Hao

AU - Ma, Xudong

AU - Deng, Yaoyu

AU - Ding, Xinyu

AU - Cao, Ke

AU - Shang, Hui

AU - Jiao, Wenlong

AU - Xie, Huikai

PY - 2026

Y1 - 2026

N2 - In this paper, we report the design, fabrication, and characterization of a micromirror capable of four-degree-of-freedom (DOF) motion, i.e., tip, tilt. piston (TTP) and mirror curvature tuning, all generated by piezoelectric actuation. The mirror plate has an optical aperture of 1.0 mm2 and its radius of curvature changes from 10.98 mm-1 to 12.28 mm-1 under a DC bias voltage of ± 50 V. The measured first three resonant modes are located at 1.680 kHz (piston), 2.611 kHz (tip), and 2.660 kHz (tilt), respectively. Under a driving voltage of 40 Vpp, the optical scanning angle and vertical displacement of the mirror plate can reach 13.0° (tilt) at 2.660 kHz and 48 μ m at 1.680 kHz, respectively. This design has promising applications in various compact optical systems.

AB - In this paper, we report the design, fabrication, and characterization of a micromirror capable of four-degree-of-freedom (DOF) motion, i.e., tip, tilt. piston (TTP) and mirror curvature tuning, all generated by piezoelectric actuation. The mirror plate has an optical aperture of 1.0 mm2 and its radius of curvature changes from 10.98 mm-1 to 12.28 mm-1 under a DC bias voltage of ± 50 V. The measured first three resonant modes are located at 1.680 kHz (piston), 2.611 kHz (tip), and 2.660 kHz (tilt), respectively. Under a driving voltage of 40 Vpp, the optical scanning angle and vertical displacement of the mirror plate can reach 13.0° (tilt) at 2.660 kHz and 48 μ m at 1.680 kHz, respectively. This design has promising applications in various compact optical systems.

KW - MEMS mirror

KW - MEMS scanner

KW - focus-tunable

KW - piezoelectric actuator

KW - thin film AIN

UR - https://www.scopus.com/pages/publications/105041723273

U2 - 10.1109/MEMS64181.2026.11419572

DO - 10.1109/MEMS64181.2026.11419572

M3 - Conference contribution

AN - SCOPUS:105041723273

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 867

EP - 870

BT - 2026 IEEE 39th International Conference on Micro Electro Mechanical Systems, MEMS 2026

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 39th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2026

Y2 - 25 January 2026 through 29 January 2026

ER -

Chen H, Ma X, Deng Y, Ding X, Cao K, Shang H 等. An ALN-Based Piezoelectric Micromirror with Four-Degree-of-Freedom Motion. 在 2026 IEEE 39th International Conference on Micro Electro Mechanical Systems, MEMS 2026. Institute of Electrical and Electronics Engineers Inc. 2026. 页码 867-870. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMS64181.2026.11419572

An ALN-Based Piezoelectric Micromirror with Four-Degree-of-Freedom Motion

摘要

出版系列

会议

访问文件

其它文件与链接

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引用此