An adaptive tracking measurement method for inner surface of laser fusion targets

We propose an adaptive tracking measurement method for accurate, rapid, and non-invasive measurement of the topography of the inner surface of fusion targets. During the first phase of the measurement, we measure the low-frequency components of the inner surface of the target using a laser differential confocal axial point-by-point scanning measurement method with a large dynamic range. During to the second phase of the measurement, based on the low-frequency components data, the objective lens is driven by a scanner for adaptive large-interval movement, simultaneously, we measure the high-frequency components in the large-interval using a laser differential confocal linear sensing measurement method. Combined with the mutually perpendicular slewing shafts system, the three-dimensional topography of the inner surface of the target can be measured.