@inproceedings{9a3f5e025f774a1b9e762dadf840673e,
title = "Accuracy evaluations of axial localisation algorithms in confocal microscopy",
abstract = "The localisation accuracy of axial peaks is an important factor for height determination in a confocal microscope. Several algorithms have been proposed for height extraction in surface topography measurements. However, some algorithms ignore the influence of error and discrete sampling on the accuracy. This paper analyzes the localisation accuracy of some common algorithms under different aberrations and random errors, and discusses the effect of axial scanning interval on the accuracy of each algorithm. Finally, we get the application scope of each algorithm. Our results offer a reference for selecting algorithms for confocal metrology.",
keywords = "Axial peak extraction, Confocal microscopy, Measurement uncertainty, Surface measurement",
author = "Rongjun Shao and Weiqian Zhao and Lirong Qiu and Yun Wang and Ruirui Zhang",
note = "Publisher Copyright: {\textcopyright} 2018 SPIE.; Optical Metrology and Inspection for Industrial Applications V 2018 ; Conference date: 11-10-2018 Through 13-10-2018",
year = "2018",
doi = "10.1117/12.2501031",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Toru Yoshizawa and Song Zhang and Sen Han and Sen Han",
booktitle = "Optical Metrology and Inspection for Industrial Applications V",
address = "United States",
}