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A wide-angle immersed MEMS mirror and its application in optical coherence tomography

  • Xiaoyang Zhang
  • , Liang Zhou
  • , Can Duan
  • , Dong Zheng
  • , Sanjeev Koppal
  • , Quentin Tanguy
  • , Huikai Xie
  • University of Florida

科研成果: 书/报告/会议事项章节会议稿件同行评审

摘要

In this paper we report a wide-angle two-axis electrothermal MEMS scanning mirror and its application in optical coherence tomography (OCT). The wide-angle scanning was achieved by combining the large scan range of the MEMS mirror and the 'Snell's Window' effect. By immersing the electrothermal MEMS mirror into a mineral oil, the original 32° field of view (FOV) can be increased up to about 75°. The wide-angle immersed mirror was employed in an OCT system and 3D OCT images were successfully obtained.

源语言英语
主期刊名2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings
出版商IEEE Computer Society
ISBN(电子版)9781509010356
DOI
出版状态已出版 - 13 9月 2016
已对外发布
活动21st International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Singapore, 新加坡
期限: 31 7月 20164 8月 2016

出版系列

姓名International Conference on Optical MEMS and Nanophotonics
2016-September
ISSN(印刷版)2160-5033
ISSN(电子版)2160-5041

会议

会议21st International Conference on Optical MEMS and Nanophotonics, OMN 2016
国家/地区新加坡
Singapore
时期31/07/164/08/16

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