TY - JOUR
T1 - A two-axis electrothermal micromirror for endoscopic optical coherence tomography
AU - Jain, Ankur
AU - Kopa, Anthony
AU - Pan, Yingtian
AU - Feeder, Gary K.
AU - Xie, Huikai
PY - 2004/5
Y1 - 2004/5
N2 - This paper reports a 1-mm2, two-axis, single-crystalline-silicon (SCS)-based aluminum-coated scanning micromirror with large rotation angle (up to 40°), which can be used in an endoscopic optical coherence tomography imaging system. The micromirror is fabricated using a deep reactive ion etch post-CMOS micromachining process. The static response, frequency response, resonance frequency shift, and thermal imaging of the device are presented. A 4 × 4 pixel display using this two-dimensional micromirror device has been demonstrated.
AB - This paper reports a 1-mm2, two-axis, single-crystalline-silicon (SCS)-based aluminum-coated scanning micromirror with large rotation angle (up to 40°), which can be used in an endoscopic optical coherence tomography imaging system. The micromirror is fabricated using a deep reactive ion etch post-CMOS micromachining process. The static response, frequency response, resonance frequency shift, and thermal imaging of the device are presented. A 4 × 4 pixel display using this two-dimensional micromirror device has been demonstrated.
KW - Electrothermal actuation
KW - Microactuators
KW - Optical coherence tomography
KW - Optical scanners
KW - Two-dimensional (2-D) mirrors
UR - https://www.scopus.com/pages/publications/4344565790
U2 - 10.1109/JSTQE.2004.829194
DO - 10.1109/JSTQE.2004.829194
M3 - Article
AN - SCOPUS:4344565790
SN - 1077-260X
VL - 10
SP - 636
EP - 642
JO - IEEE Journal of Selected Topics in Quantum Electronics
JF - IEEE Journal of Selected Topics in Quantum Electronics
IS - 3
ER -