A tunable microlens scanner with large-vertical-displacement actuation

Ankur Jain; Huikai Xie

A tunable microlens scanner with large-vertical-displacement actuation

Ankur Jain^*
, Huikai Xie

^*此作品的通讯作者

University of Florida

科研成果: 期刊稿件 › 会议文章 › 同行评审

5 引用（Scopus）

摘要

We report the design, fabrication and operation of a tunable microlens that can perform large vertical scans at low actuation voltages. Photoresist reflow technique was used to form a 210 μm diameter microlens on a lens holder that is integrated with a large-vertical-displacement (LVD) microactuator. The lens holder is fabricated using a unique DRIE CMOS-MEMS process. A maximum vertical displacement of 280 μm is achieved with a 700 μm-by-320 μm LVD device at an actuation voltage of 10 V. The microlens has a focal length of 188 μ, a numerical aperture of 0.35, and a resonant frequency of about 1 kHz.

源语言	英语
文章编号	MP10
页（从-至）	92-95
页数	4
期刊	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
出版状态	已出版 - 2005
已对外发布	是
活动	18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Miami Beach, FL, 美国期限: 30 1月 2005 → 3 2月 2005

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引用此

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title = "A tunable microlens scanner with large-vertical-displacement actuation",

abstract = "We report the design, fabrication and operation of a tunable microlens that can perform large vertical scans at low actuation voltages. Photoresist reflow technique was used to form a 210 μm diameter microlens on a lens holder that is integrated with a large-vertical-displacement (LVD) microactuator. The lens holder is fabricated using a unique DRIE CMOS-MEMS process. A maximum vertical displacement of 280 μm is achieved with a 700 μm-by-320 μm LVD device at an actuation voltage of 10 V. The microlens has a focal length of 188 μ, a numerical aperture of 0.35, and a resonant frequency of about 1 kHz.",

author = "Ankur Jain and Huikai Xie",

year = "2005",

language = "English",

pages = "92--95",

journal = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

issn = "1084-6999",

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note = "18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami ; Conference date: 30-01-2005 Through 03-02-2005",

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T1 - A tunable microlens scanner with large-vertical-displacement actuation

AU - Jain, Ankur

AU - Xie, Huikai

PY - 2005

Y1 - 2005

N2 - We report the design, fabrication and operation of a tunable microlens that can perform large vertical scans at low actuation voltages. Photoresist reflow technique was used to form a 210 μm diameter microlens on a lens holder that is integrated with a large-vertical-displacement (LVD) microactuator. The lens holder is fabricated using a unique DRIE CMOS-MEMS process. A maximum vertical displacement of 280 μm is achieved with a 700 μm-by-320 μm LVD device at an actuation voltage of 10 V. The microlens has a focal length of 188 μ, a numerical aperture of 0.35, and a resonant frequency of about 1 kHz.

AB - We report the design, fabrication and operation of a tunable microlens that can perform large vertical scans at low actuation voltages. Photoresist reflow technique was used to form a 210 μm diameter microlens on a lens holder that is integrated with a large-vertical-displacement (LVD) microactuator. The lens holder is fabricated using a unique DRIE CMOS-MEMS process. A maximum vertical displacement of 280 μm is achieved with a 700 μm-by-320 μm LVD device at an actuation voltage of 10 V. The microlens has a focal length of 188 μ, a numerical aperture of 0.35, and a resonant frequency of about 1 kHz.

UR - https://www.scopus.com/pages/publications/26844559805

M3 - Conference article

AN - SCOPUS:26844559805

SN - 1084-6999

SP - 92

EP - 95

JO - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

JF - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

M1 - MP10

T2 - 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami

Y2 - 30 January 2005 through 3 February 2005

ER -

A tunable microlens scanner with large-vertical-displacement actuation

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