TY - JOUR
T1 - A single-crystal silicon micromirror for large bi-directional 2D scanning applications
AU - Jain, Ankur
AU - Xie, Huikai
PY - 2006/8/14
Y1 - 2006/8/14
N2 - This paper reports the design, fabrication and operation of a two-dimensional (2D) micromirror that can generate large bi-directional scans at low actuation voltages. This single-crystal silicon (SCS) micromirror device has been fabricated by using a unique DRIE CMOS-MEMS process that can simultaneously provide thin-film and SCS microstructures. A fabricated micromirror has negligible initial tilt angle, and can perform large bi-directional 2D optical scans (over ±30°) at less than 12 V dc. 2D dynamic scanning using this mirror has been demonstrated by obtaining a 14° × 50° angular raster scan pattern. This device can also perform vertical displacements up to 0.5 mm at about 15 V dc.
AB - This paper reports the design, fabrication and operation of a two-dimensional (2D) micromirror that can generate large bi-directional scans at low actuation voltages. This single-crystal silicon (SCS) micromirror device has been fabricated by using a unique DRIE CMOS-MEMS process that can simultaneously provide thin-film and SCS microstructures. A fabricated micromirror has negligible initial tilt angle, and can perform large bi-directional 2D optical scans (over ±30°) at less than 12 V dc. 2D dynamic scanning using this mirror has been demonstrated by obtaining a 14° × 50° angular raster scan pattern. This device can also perform vertical displacements up to 0.5 mm at about 15 V dc.
KW - Bi-directional scanning
KW - Electrothermal actuation
KW - Large rotation angle
KW - Large vertical displacement
KW - Optical scanner
KW - Two-dimensional (2D) micromirror
UR - https://www.scopus.com/pages/publications/33745859351
U2 - 10.1016/j.sna.2005.10.030
DO - 10.1016/j.sna.2005.10.030
M3 - Article
AN - SCOPUS:33745859351
SN - 0924-4247
VL - 130-131
SP - 454
EP - 460
JO - Sensors and Actuators A: Physical
JF - Sensors and Actuators A: Physical
IS - SPEC. ISS.
ER -