@inproceedings{5d43ea61a2404eeeb70701b51d50cd11,
title = "A Single-Crystal Silicon-Based Micromirror with Large Scanning Angle for Biomedical Applications",
abstract = "This paper reports a single-crystalline silicon (SCS)-based micromirror with large scanning angle (up to 31°) which can be used for biomedical imaging. The micromirror is fabricated by using a deep reactive-ion-etch (DRIE) post-CMOS micromachining process. Thin bimorph actuation structures and movable bulk silicon structures are simultaneously achieved. The micromirror is 1 mm by 1 mm in size, coated with aluminum, and thermally actuated by an integrated polysilicon heater. The radius of curvature of the mirror surface is about 50 cm. The mirror rotates 31° at 9 mA. The resonant frequency of the device is 380 Hz.",
author = "Huikai Xie and Ankur Jain and Tuqiang Xie and Yingtian Pan and Fedder, \{Gary K.\}",
note = "Publisher Copyright: {\textcopyright} 2003 OSA/CLEO 2003.; Conference on Lasers and Electro-Optics, CLEO 2003 ; Conference date: 01-06-2003 Through 06-06-2003",
year = "2003",
language = "English",
series = "Optics InfoBase Conference Papers",
publisher = "Optica Publishing Group (formerly OSA)",
booktitle = "Conference on Lasers and Electro-Optics, CLEO 2003",
address = "United States",
}