@inproceedings{ddaaf1f465b4463eb523eb93bb14c736,
title = "A self-aligned mask-free fabrication process for high-frequency ZnO array transducer",
abstract = "High-frequency ultrasonic array transducers are essential for high resolution imaging in clinical analysis and Non Destructive Evaluation (NDE). However, the fabrication of piezoelectric array transducers is a great challenge due to the small features in elaborating piezoelectric array films. This paper describes a MEMS based self-aligned mask-free process for fabrication of ZnO linear array transducers of more than 100MHz. A four-step-rotation deposition approach is proposed and investigated, that improves the lateral growth in ZnO array deposition. The ratio of vertical to lateral growth is improved by 40\% compared to one-step deposition method. The results prove that the reduction of the lateral growth helps to achieve full-kerfed ZnO array with smaller pitch.",
author = "Zhang, \{J. Y.\} and Xu, \{W. J.\} and J. Carlier and E. Moulin and D. Remiens and Ji, \{X. M.\} and Huang, \{Y. P.\} and Chen, \{S. M.\}",
year = "2012",
doi = "10.1109/ULTSYM.2012.0453",
language = "English",
isbn = "9781467345613",
series = "IEEE International Ultrasonics Symposium, IUS",
pages = "1806--1809",
booktitle = "2012 IEEE International Ultrasonics Symposium, IUS 2012",
note = "2012 IEEE International Ultrasonics Symposium, IUS 2012 ; Conference date: 07-10-2012 Through 10-10-2012",
}