@inproceedings{61151d7b656848b0a677cc2bf1a4bd86,
title = "A Robust Lateral Shift Free (LSF) Electrothermal Micromirror with Multi-Segment Flexible Connections",
abstract = "In recent years, electrothermal micromirrors have attracted widespread interest in hand-held scanning applications. In actual use, the impact resistance of the micromirror is a key parameter that needs to be carefully considered. This paper proposed a robust lateral-shift-free (LSF) electrothermal micromirror with multi-segment flexible connections. Those connections are composed of Photosensitive Polyimide (PSPI) and distributed at the end of each bimorph. Experiments show that the optimized micromirror can withstand a drop height of about 110 cm on the clean room floor, and its impact resistance is about 15 times higher than that of the normal electrothermal micromirrors.",
keywords = "Bimorph, Electrothermal Micromirror, MEMS, Photosensitive Polyimide, Robust",
author = "Hengzhang Yang and Qiangqiang Liu and Yingtao Ding and Anrun Ren and Shuailong Zhang and Xiaoyi Wang and Huikai Xie",
note = "Publisher Copyright: {\textcopyright} 2026 IEEE.; 39th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2026 ; Conference date: 25-01-2026 Through 29-01-2026",
year = "2026",
doi = "10.1109/MEMS64181.2026.11419548",
language = "English",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "859--862",
booktitle = "2026 IEEE 39th International Conference on Micro Electro Mechanical Systems, MEMS 2026",
address = "United States",
}