@inproceedings{795500c4653a4fbc8cdbfefb113cf3b2,
title = "A process for fabricating robust electrothermal micromirrors with customizable thermal response time and power consumption",
abstract = "A novel process for fabricating robust electrothermal bimorph based MEMS devices is reported and scanning electrothermal micromirrors are fabricated. Device parameters can be chosen to customize thermal response time and power requirements. Aluminum (Al) and Tungsten (W) form the active bimorph layers and polyimide is used for thermal isolation.",
keywords = "MEMS, electrothermal, micromirror, robust",
author = "S. Pal and H. Xie",
year = "2011",
doi = "10.1109/OMEMS.2011.6031066",
language = "English",
isbn = "9781457703362",
series = "International Conference on Optical MEMS and Nanophotonics",
pages = "157--158",
booktitle = "Proceedings - OMN2011",
note = "16th International Conference on Optical MEMS and Nanophotonics, OMN2011 ; Conference date: 08-08-2011 Through 11-08-2011",
}