@inproceedings{9706fa74df51443ab7512191a1505983,
title = "A Mid-Infrared Micro-Spectrometer Via MEMS Analog Micromirror Array and Metasurface Filter Matrix",
abstract = "This work demonstrates a computational mid-infrared (MIR) micro-spectrometer that integrates a 4 × 4 electrothermally actuated analog micromirror array (AMA) and a 4 × 4 MIR metasurface filter array into a compact system. High-aspect-ratio through silicon vias (TSVs) are monolithically integrated into the electrothermal MEMS mirrors of the AMA, enabling efficient electrical addressing and high-speed actuation with minimal footprint. The pitches in both x and y direction are 8.5 mm and the size of each mirror plate is 1.7 mm × 1.7 mm, resulting in a fill factor of 64 \%. The AMA gates the metasurface filter to encode and decode incident spectra in a time-division multiplexing manner. Each metasurface filter exhibits a unique spectral response, enabling spatially-resolved spectral detection. A mean square error (MSE) less than 0.1 \% of the reconstructed spectrum is acquired, compared to commercial MIR spectrometers.",
keywords = "AMA, Analog micromirror array, MIR spectrometer, TSVs, electrothermal actuation, metasurface filter",
author = "Xinyu Ding and Jihui Ni and Yue Tang and Huikai Xie",
note = "Publisher Copyright: {\textcopyright} 2026 IEEE.; 39th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2026 ; Conference date: 25-01-2026 Through 29-01-2026",
year = "2026",
doi = "10.1109/MEMS64181.2026.11419478",
language = "English",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "271--274",
booktitle = "2026 IEEE 39th International Conference on Micro Electro Mechanical Systems, MEMS 2026",
address = "United States",
}