@inproceedings{c2fa3d739c404b9a9931b12b872ba51a,
title = "A MEMS fast-steering mirror with parallel-plate electrostatic actuation for free-space optical communications",
abstract = "Free-space optical communication (FSO) systems require large-aperture fast steering mirrors with small form factor for inter-satellite laser pointing. In this work, an parallel-plate electrostatic MEMS mirror with a large aperture of 10 mm and a footprint of 22 mm {\texttimes} 22 mm is developed.",
keywords = "fast steering mirror, free-space optical communication, parallel-plate actuation",
author = "Yingchao Cao and Hua Wang and Yaoyu Deng and Sijia Xu and Qiangxian Qi and Shaoyu Zhao and Huikai Xie",
note = "Publisher Copyright: {\textcopyright} 2025 IEEE.; 2025 International Conference on Optical MEMS and Nanophotonics, OMN 2025 ; Conference date: 13-07-2025 Through 18-07-2025",
year = "2025",
doi = "10.1109/OMN65869.2025.11126003",
language = "English",
series = "International Conference on Optical MEMS and Nanophotonics",
publisher = "IEEE Computer Society",
booktitle = "2025 International Conference on Optical MEMS and Nanophotonics, OMN 2025",
address = "United States",
}