A MEMS based fourier transform spectrometer and its scan stability study

Junyu Chai; Hongzhi Jia; Donglin Wang; Hongqiong Liu; Qiao Chen; Huikai Xie

doi:10.1149/2.0051807jss

A MEMS based fourier transform spectrometer and its scan stability study

Junyu Chai
, Hongzhi Jia
, Donglin Wang
, Hongqiong Liu
, Qiao Chen
, Huikai Xie

科研成果: 期刊稿件 › 文章 › 同行评审

12 引用（Scopus）

摘要

An Fourier Transform Spectrometer (FTS) based on an H-shaped electrothermally actuated microelectromechanical system (MEMS) scanning mirror has been developed. TheMEMS scanning mirror can generate about 200 μm at 5 Hz with only 5 Vpp and maintain a very small tilting of about 0.029° without using any complex compensation or closed-loop control. This high scanning performance is achieved by using a unique H-shaped frame supported by symmetrically distributed thirty-two pairs of innovative three-level-ladder bimorph actuators. ThisMEMS FTS can cover a wide spectral range of 1000-2500 nm. A spectral resolution of 64.1 cm^-1, or 11 nm at 1310 nm, is achieved.

源语言	英语
页（从-至）	Q3025-Q3031
期刊	ECS Journal of Solid State Science and Technology
卷	7
期	7
DOI	https://doi.org/10.1149/2.0051807jss
出版状态	已出版 - 2018
已对外发布	是

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title = "A MEMS based fourier transform spectrometer and its scan stability study",

abstract = "An Fourier Transform Spectrometer (FTS) based on an H-shaped electrothermally actuated microelectromechanical system (MEMS) scanning mirror has been developed. TheMEMS scanning mirror can generate about 200 μm at 5 Hz with only 5 Vpp and maintain a very small tilting of about 0.029° without using any complex compensation or closed-loop control. This high scanning performance is achieved by using a unique H-shaped frame supported by symmetrically distributed thirty-two pairs of innovative three-level-ladder bimorph actuators. ThisMEMS FTS can cover a wide spectral range of 1000-2500 nm. A spectral resolution of 64.1 cm-1, or 11 nm at 1310 nm, is achieved.",

author = "Junyu Chai and Hongzhi Jia and Donglin Wang and Hongqiong Liu and Qiao Chen and Huikai Xie",

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T1 - A MEMS based fourier transform spectrometer and its scan stability study

AU - Chai, Junyu

AU - Jia, Hongzhi

AU - Wang, Donglin

AU - Liu, Hongqiong

AU - Chen, Qiao

AU - Xie, Huikai

PY - 2018

Y1 - 2018

N2 - An Fourier Transform Spectrometer (FTS) based on an H-shaped electrothermally actuated microelectromechanical system (MEMS) scanning mirror has been developed. TheMEMS scanning mirror can generate about 200 μm at 5 Hz with only 5 Vpp and maintain a very small tilting of about 0.029° without using any complex compensation or closed-loop control. This high scanning performance is achieved by using a unique H-shaped frame supported by symmetrically distributed thirty-two pairs of innovative three-level-ladder bimorph actuators. ThisMEMS FTS can cover a wide spectral range of 1000-2500 nm. A spectral resolution of 64.1 cm-1, or 11 nm at 1310 nm, is achieved.

AB - An Fourier Transform Spectrometer (FTS) based on an H-shaped electrothermally actuated microelectromechanical system (MEMS) scanning mirror has been developed. TheMEMS scanning mirror can generate about 200 μm at 5 Hz with only 5 Vpp and maintain a very small tilting of about 0.029° without using any complex compensation or closed-loop control. This high scanning performance is achieved by using a unique H-shaped frame supported by symmetrically distributed thirty-two pairs of innovative three-level-ladder bimorph actuators. ThisMEMS FTS can cover a wide spectral range of 1000-2500 nm. A spectral resolution of 64.1 cm-1, or 11 nm at 1310 nm, is achieved.

UR - https://www.scopus.com/pages/publications/85051385214

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DO - 10.1149/2.0051807jss

M3 - Article

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SP - Q3025-Q3031

JO - ECS Journal of Solid State Science and Technology

JF - ECS Journal of Solid State Science and Technology

IS - 7

ER -

A MEMS based fourier transform spectrometer and its scan stability study

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