@inproceedings{a8627d09223e4fdf80e1c391a4694a12,
title = "A large-aperture, piston-tip-tilt micromirror for optical phase array applications",
abstract = "This paper reports the design, fabrication and characterization of a 4x4 micromirror array consisting of piston-tip-tilt electrothermal MEMS mirrors. Each mirror has an optical aperture size of 0.5x0.5 mm2. Both tip and tilt angles of over ±30° are obtained at less than 5 Vdc, and the piston displacement reaches 215 μm at 4 Vdc. Two-dimensional scanning was demonstrated. Thermal analysis and transient response were also reported.",
author = "L. Wu and Maley, \{S. B.\} and Dooley, \{S. R.\} and Nelson, \{T. R.\} and McManamon, \{P. F.\} and H. Xie",
year = "2008",
doi = "10.1109/MEMSYS.2008.4443766",
language = "English",
isbn = "9781424417933",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
pages = "754--757",
booktitle = "MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems",
note = "21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson ; Conference date: 13-01-2008 Through 17-01-2008",
}