A curved multimorph based electrothermal micromirror with large scan range and low drive voltage

Engineering

• Micromirrors 100%
• Drive Voltage 100%
• Resonant Mode 66%
• Applied Voltage 33%
• Two Dimensional 33%
• Active Layer 33%
• Resistive 33%
• Low Power Consumption 33%
• Resonant Frequency 33%
• Power Input 33%
• Micro Machining 33%
• Chip Area 33%