A controllable IC-compatible thin-film fuse realized using electro-explosion

Xuran Ding; Wenzhong Lou; Yue Feng

doi:10.1063/1.4941074

A controllable IC-compatible thin-film fuse realized using electro-explosion

Xuran Ding^*
, Wenzhong Lou
, Yue Feng

^*此作品的通讯作者

机电学院

Beijing Institute of Technology

科研成果: 期刊稿件 › 文章 › 同行评审

7 引用（Scopus）

摘要

A controllable IC-compatible thin-film fuse was developed that had Al/SiO₂ thin-film stacks on a silicon substrate. The micro fuse has both a traditional mode and a controllable mode when applied as a fuse. It blows at 800 mA and 913.8 mV in the traditional mode. In the controllable mode, it blows within 400 ns at 10 V. It can be used for small electronic elements as well as electropyrotechnic initiators to improve the no-firing current.

源语言	英语
文章编号	015316
期刊	AIP Advances
卷	6
期	1
DOI	https://doi.org/10.1063/1.4941074
出版状态	已出版 - 1月 2016

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abstract = "A controllable IC-compatible thin-film fuse was developed that had Al/SiO2 thin-film stacks on a silicon substrate. The micro fuse has both a traditional mode and a controllable mode when applied as a fuse. It blows at 800 mA and 913.8 mV in the traditional mode. In the controllable mode, it blows within 400 ns at 10 V. It can be used for small electronic elements as well as electropyrotechnic initiators to improve the no-firing current.",

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A controllable IC-compatible thin-film fuse realized using electro-explosion

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