A Ceramic PZT-Based PMUT Array for Endoscopic Photoacoustic Imaging

Haoran Wang; Zhenfang Chen; Hao Yang; Huabei Jiang; Huikai Xie

doi:10.1109/JMEMS.2020.3010773

A Ceramic PZT-Based PMUT Array for Endoscopic Photoacoustic Imaging

Haoran Wang^*
, Zhenfang Chen
, Hao Yang
, Huabei Jiang
, Huikai Xie

^*此作品的通讯作者

集成电路与电子学院

University of Florida
MEMS Engineering and Material Inc.
University of South Florida

科研成果: 期刊稿件 › 文章 › 同行评审

35 引用（Scopus）

摘要

In this paper, we present the design, fabrication, and characterization of a compact 4× 4 piezoelectric micromachined ultrasonic transducer (pMUT) array and its application to photoacoustic imaging. The uniqueness of this pMUT array is the integration of a 4μ m-thick ceramic PZT, having significantly higher piezoelectric coefficient and lower stress than sol-gel or sputtered PZT. The fabricated pMUT array has a small chip size of only 1.8×1.6 mm2 with each pMUT element having a diameter of 210μ m. The fabricated device was characterized with electrical impedance measurement and acoustic sensing test. Photoacoustic imaging has also been successfully demonstrated on an agar phantom with a pencil lead embedded using the fabricated pMUT array. [2020-0087].

源语言	英语
文章编号	9151286
页（从-至）	1038-1043
页数	6
期刊	Journal of Microelectromechanical Systems
卷	29
期	5
DOI	https://doi.org/10.1109/JMEMS.2020.3010773
出版状态	已出版 - 10月 2020

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10.1109/JMEMS.2020.3010773

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引用此

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title = "A Ceramic PZT-Based PMUT Array for Endoscopic Photoacoustic Imaging",

abstract = "In this paper, we present the design, fabrication, and characterization of a compact 4× 4 piezoelectric micromachined ultrasonic transducer (pMUT) array and its application to photoacoustic imaging. The uniqueness of this pMUT array is the integration of a 4μ m-thick ceramic PZT, having significantly higher piezoelectric coefficient and lower stress than sol-gel or sputtered PZT. The fabricated pMUT array has a small chip size of only 1.8×1.6 mm2 with each pMUT element having a diameter of 210μ m. The fabricated device was characterized with electrical impedance measurement and acoustic sensing test. Photoacoustic imaging has also been successfully demonstrated on an agar phantom with a pencil lead embedded using the fabricated pMUT array. [2020-0087].",

keywords = "Microelectromechanical systems, PMUT array, ceramic pzt, endoscopic imaging, photoacoustic imaging, piezoelectric micromachined ultrasonic transducers",

author = "Haoran Wang and Zhenfang Chen and Hao Yang and Huabei Jiang and Huikai Xie",

note = "Publisher Copyright: {\textcopyright} 1992-2012 IEEE.",

year = "2020",

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AU - Yang, Hao

AU - Jiang, Huabei

AU - Xie, Huikai

PY - 2020/10

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AB - In this paper, we present the design, fabrication, and characterization of a compact 4× 4 piezoelectric micromachined ultrasonic transducer (pMUT) array and its application to photoacoustic imaging. The uniqueness of this pMUT array is the integration of a 4μ m-thick ceramic PZT, having significantly higher piezoelectric coefficient and lower stress than sol-gel or sputtered PZT. The fabricated pMUT array has a small chip size of only 1.8×1.6 mm2 with each pMUT element having a diameter of 210μ m. The fabricated device was characterized with electrical impedance measurement and acoustic sensing test. Photoacoustic imaging has also been successfully demonstrated on an agar phantom with a pencil lead embedded using the fabricated pMUT array. [2020-0087].

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KW - piezoelectric micromachined ultrasonic transducers

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A Ceramic PZT-Based PMUT Array for Endoscopic Photoacoustic Imaging

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