A 3-D micromirror utilizing inverted-series-connected electrothermal bimorph actuators for piston and tilt motion

Shane T. Todd; Ankur Jain; Hongwei Qu; Huikai Xie

doi:10.1109/OMEMS.2005.1540059

A 3-D micromirror utilizing inverted-series-connected electrothermal bimorph actuators for piston and tilt motion

Shane T. Todd^*
, Ankur Jain
, Hongwei Qu
, Huikai Xie

^*此作品的通讯作者

University of Florida

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

4 引用（Scopus）

摘要

A new electrothermal micromirror with large piston and tilt motions was proposed and fabricated. Large initial tilt angles and optical path shifting of previously fabricated thermal micromirrors were eliminated by employing inverted-series-connected (ISC) bimorph actuators.

源语言	英语
主期刊名	IEEE/LEOS Optical MEMS 2005
主期刊副标题	International Conference on Optical MEMS and Their Applications
页	27-28
页数	2
DOI	https://doi.org/10.1109/OMEMS.2005.1540059
出版状态	已出版 - 2005
已对外发布	是
活动	IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications - Oulu, 芬兰期限: 1 8月 2005 → 4 8月 2005

出版系列

姓名	IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications

会议

会议	IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications
国家/地区	芬兰
市	Oulu
时期	1/08/05 → 4/08/05

访问文件

10.1109/OMEMS.2005.1540059

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引用此

Todd, S. T., Jain, A., Qu, H., & Xie, H. (2005). A 3-D micromirror utilizing inverted-series-connected electrothermal bimorph actuators for piston and tilt motion. 在 IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications (页码 27-28). 文章 1540059 (IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications). https://doi.org/10.1109/OMEMS.2005.1540059

Todd, Shane T. ; Jain, Ankur ; Qu, Hongwei 等. / A 3-D micromirror utilizing inverted-series-connected electrothermal bimorph actuators for piston and tilt motion. IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications. 2005. 页码 27-28 (IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications).

@inproceedings{4c5fd450ec2c47c2bf288d84ba41666c,

title = "A 3-D micromirror utilizing inverted-series-connected electrothermal bimorph actuators for piston and tilt motion",

abstract = "A new electrothermal micromirror with large piston and tilt motions was proposed and fabricated. Large initial tilt angles and optical path shifting of previously fabricated thermal micromirrors were eliminated by employing inverted-series-connected (ISC) bimorph actuators.",

author = "Todd, \{Shane T.\} and Ankur Jain and Hongwei Qu and Huikai Xie",

year = "2005",

doi = "10.1109/OMEMS.2005.1540059",

language = "English",

isbn = "0780392787",

series = "IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications",

pages = "27--28",

booktitle = "IEEE/LEOS Optical MEMS 2005",

note = "IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications ; Conference date: 01-08-2005 Through 04-08-2005",

}

Todd, ST, Jain, A, Qu, H & Xie, H 2005, A 3-D micromirror utilizing inverted-series-connected electrothermal bimorph actuators for piston and tilt motion. 在 IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications., 1540059, IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications, 页码 27-28, IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications, Oulu, 芬兰, 1/08/05. https://doi.org/10.1109/OMEMS.2005.1540059

A 3-D micromirror utilizing inverted-series-connected electrothermal bimorph actuators for piston and tilt motion. / Todd, Shane T.; Jain, Ankur; Qu, Hongwei 等.
IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications. 2005. 页码 27-28 1540059 (IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications).

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

TY - GEN

T1 - A 3-D micromirror utilizing inverted-series-connected electrothermal bimorph actuators for piston and tilt motion

AU - Todd, Shane T.

AU - Jain, Ankur

AU - Qu, Hongwei

AU - Xie, Huikai

PY - 2005

Y1 - 2005

N2 - A new electrothermal micromirror with large piston and tilt motions was proposed and fabricated. Large initial tilt angles and optical path shifting of previously fabricated thermal micromirrors were eliminated by employing inverted-series-connected (ISC) bimorph actuators.

AB - A new electrothermal micromirror with large piston and tilt motions was proposed and fabricated. Large initial tilt angles and optical path shifting of previously fabricated thermal micromirrors were eliminated by employing inverted-series-connected (ISC) bimorph actuators.

UR - https://www.scopus.com/pages/publications/33749057718

U2 - 10.1109/OMEMS.2005.1540059

DO - 10.1109/OMEMS.2005.1540059

M3 - Conference contribution

AN - SCOPUS:33749057718

SN - 0780392787

SN - 9780780392786

T3 - IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications

SP - 27

EP - 28

BT - IEEE/LEOS Optical MEMS 2005

T2 - IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications

Y2 - 1 August 2005 through 4 August 2005

ER -

Todd ST, Jain A, Qu H, Xie H. A 3-D micromirror utilizing inverted-series-connected electrothermal bimorph actuators for piston and tilt motion. 在 IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications. 2005. 页码 27-28. 1540059. (IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications). doi: 10.1109/OMEMS.2005.1540059

A 3-D micromirror utilizing inverted-series-connected electrothermal bimorph actuators for piston and tilt motion

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