@inproceedings{4ed1cd1a09b14c89a389a7f61ecb9105,
title = "A 2.8-MM imaging probe based on a high-fill-factor MEMS mirror and wire-bonding-free packaging for endoscopic optical coherence tomography",
abstract = "This paper reports a miniature optical coherence tomography (OCT) probe and high-resolution 3D OCT imaging results obtained with this probe. The probe is only 2.8-mm in diameter, enabled by a unique high-fill-factor electrothermal MEMS mirror with hidden actuators and a novel wire-bonding-free (WBF) packaging technique. The MEMS mirror has a large mirror aperture of 1 mm with a chip size of only 1.55×1.7×0.5 mm3. The fabricated device achieves large 2-D scan optical angles up to 46° at only 4.8 V. High-resolution 3D OCT imaging results are also demonstrated using this assembled probe.",
author = "L. Wu and Samuelson, {S. R.} and J. Sun and W. Lau and S. Choe and Sorg, {B. S.} and K. Jia and H. Xie",
year = "2011",
doi = "10.1109/MEMSYS.2011.5734355",
language = "English",
isbn = "9781424496327",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
pages = "33--36",
booktitle = "2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011",
note = "24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 ; Conference date: 23-01-2011 Through 27-01-2011",
}