A 1mW dual-chopper amplifier for a 50-μg/√Hz monolithic CMOS-MEMS capacitive accelerometer

Deyou Fang*, Hongwei Qu, Huikai Xie

*此作品的通讯作者

科研成果: 书/报告/会议事项章节会议稿件同行评审

21 引用 (Scopus)

摘要

This paper reports a novel dual-chopper amplifier (DCA) for CMOS-MEMS capacitive accelerometers. A DCA prototype integrated with a single-axis accelerometer has been fabricated using TSMC 0.35 μm CMOS process. The DCA achieves a 16 nV/√Hz input-referred noise at 20 Hz with a power dissipation of only 1 mW. The measured accelerometer noise floor is 50 μg/√Hz down to 5 Hz.

源语言英语
主期刊名2006 Symposium on VLSI Circuits, VLSIC - Digest of Technical Papers
59-60
页数2
出版状态已出版 - 2006
已对外发布
活动2006 Symposium on VLSI Circuits, VLSIC - Honolulu, HI, 美国
期限: 15 6月 200617 6月 2006

出版系列

姓名IEEE Symposium on VLSI Circuits, Digest of Technical Papers

会议

会议2006 Symposium on VLSI Circuits, VLSIC
国家/地区美国
Honolulu, HI
时期15/06/0617/06/06

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