3-D confocal laser scanning microscopy based on a full-MEMS scanning system

Lin Liu; Huikai Xie

doi:10.1109/LPT.2013.2267794

3-D confocal laser scanning microscopy based on a full-MEMS scanning system

Lin Liu
, Huikai Xie

University of Florida

科研成果: 期刊稿件 › 文章 › 同行评审

17 引用（Scopus）

摘要

We have developed a confocal microscope using MEMS devices for laser scanning in all three axes. This full-MEMS laser scanning system is equipped with a MEMS lens scanner for deep scanning and a MEMS mirror for two-axis lateral scan. The MEMS lens scanner can move an objective lens axially by 515 μ m at only 3.2 V. The two-dimensional MEMS mirror can achieve 20° optical scan angle at 4.5 V. Two-dimensional and three-dimensional confocal reflectance images of microparticles embedded in PDMS and acute rat brain tissue are obtained. The axial and lateral resolutions are measured as 9.0 and 1.2 μ m, respectively.

源语言	英语
期刊论文编号	6544566
页（从-至）	1478-1480
页数	3
期刊	IEEE Photonics Technology Letters
卷	25
期	15
DOI	https://doi.org/10.1109/LPT.2013.2267794
出版状态	已出版 - 2013
已对外发布	是

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abstract = "We have developed a confocal microscope using MEMS devices for laser scanning in all three axes. This full-MEMS laser scanning system is equipped with a MEMS lens scanner for deep scanning and a MEMS mirror for two-axis lateral scan. The MEMS lens scanner can move an objective lens axially by 515 μ m at only 3.2 V. The two-dimensional MEMS mirror can achieve 20° optical scan angle at 4.5 V. Two-dimensional and three-dimensional confocal reflectance images of microparticles embedded in PDMS and acute rat brain tissue are obtained. The axial and lateral resolutions are measured as 9.0 and 1.2 μ m, respectively.",

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3-D confocal laser scanning microscopy based on a full-MEMS scanning system

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