(110) Silicon-based fiber coupling grooves

Two mutually vertical fibers coupling grooves are fabricated by using anisotropic etching of the (110) silicon in the KOH solution. It is difficult to design accurately to fix the fibers because non-standard V-grooves are formed. The dentate groove is devised which is composed of a series of the etched parallelogram pits in KOH solution. The size of the parallelogram is analyzed and designed according to anisotropic etching properties of silicon. There are some warps for the dentate groove fixing fibers because the different convexes have the disaccord of the undercuts. So the dentate groove is perfected by the rhombus compensation pattern. As a result, precisely fixing the fibers can be achieved.