微加速度传感器研究进展

The micro-accelerometer utilizes MEMS/NEMS integration technology, compatible with CMOS technology, and enables to integrate transducer and signal processing circuit on one single chip. At microscopic scale, this kind of sensor can obtain excellent physical properties due to the law of proportional scale. Additionally, this kind of sensor is also based on the research and development experience of traditional mechanical structure, and can creatively combine new materials and new process, which provides broad development prospects. With the development of integrated circuit micro-processing technology and ultra-precision mechanical processing technology, MEMS and NEMS technology and related measurement technology have become one of the research highlights. The application background of the micro-accelerometer is briefly described, and then the development and recent research status of various types of micro-accelerometers are reviewed. The structural characteristics, basic parameters, performance characteristics and measurement methods of micro-accelerometers are discussed. In view of the technical challenges faced by the current accelerometers, the potential application of new sensitive materials such as graphene in micro-accelerometers is provided and discussed. Finally, an outlook on the development of micro-accelerometers is provided.