强光元件逆向哈特曼在位检测装置误差敏感因素分析与验证

Shanshan Wang; Feng Shi; Shuo Qiao; Bowen Xu; Qun Hao; Ci Song; Guipeng Tie; Ye Tian; Dede Zhai; Xing Peng

doi:10.11884/HPLPB202335.220405

强光元件逆向哈特曼在位检测装置误差敏感因素分析与验证

Shanshan Wang
, Feng Shi^*
, Shuo Qiao
, Bowen Xu
, Qun Hao
, Ci Song
, Guipeng Tie
, Ye Tian
, Dede Zhai
, Xing Peng

^*此作品的通讯作者

光电学院

科研成果: 期刊稿件 › 文章 › 同行评审

1 引用（Scopus）

摘要

Based on optical element’s high precision in-situ measurement requirements, this paper carries out the sensitive factor simulation analysis, studies the influence of systematic structural errors and temperature errors on the measurement results, and designs and builds an in-situ measurement device to carry out measurement experiments of system temperature change, system repeatability and system stability. The results show that the simulation detection model can be used for plane/spherical/aspherical/free surface, the influence on the measurement results is mainly reflected in the low frequency error, the high frequency error is relatively small, the maximum PV value of the measurement surface shape error does not exceed 68nm (about λ/10), and the maximum RMS value does not exceed 15 nm (about λ/40).

投稿的翻译标题	Error-sensitive factors analysis and verification for optical element in-situ measurement device based on phase measuring deflectometry
源语言	繁体中文
文章编号	091002
期刊	Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams
卷	35
期	9
DOI	https://doi.org/10.11884/HPLPB202335.220405
出版状态	已出版 - 15 9月 2023

关键词

error analysis
in-situ measurement
optical element
shape measurement
simulation model

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10.11884/HPLPB202335.220405

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链接到 Scopus 的出版物

引用此

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title = "强光元件逆向哈特曼在位检测装置误差敏感因素分析与验证",

abstract = "Based on optical element{\textquoteright}s high precision in-situ measurement requirements, this paper carries out the sensitive factor simulation analysis, studies the influence of systematic structural errors and temperature errors on the measurement results, and designs and builds an in-situ measurement device to carry out measurement experiments of system temperature change, system repeatability and system stability. The results show that the simulation detection model can be used for plane/spherical/aspherical/free surface, the influence on the measurement results is mainly reflected in the low frequency error, the high frequency error is relatively small, the maximum PV value of the measurement surface shape error does not exceed 68nm (about λ/10), and the maximum RMS value does not exceed 15 nm (about λ/40).",

keywords = "error analysis, in-situ measurement, optical element, shape measurement, simulation model",

author = "Shanshan Wang and Feng Shi and Shuo Qiao and Bowen Xu and Qun Hao and Ci Song and Guipeng Tie and Ye Tian and Dede Zhai and Xing Peng",

year = "2023",

month = sep,

day = "15",

doi = "10.11884/HPLPB202335.220405",

language = "繁体中文",

volume = "35",

journal = "Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams",

issn = "1001-4322",

publisher = "Editorial Office of High Power Laser and Particle Beams",

number = "9",

}

TY - JOUR

T1 - 强光元件逆向哈特曼在位检测装置误差敏感因素分析与验证

AU - Wang, Shanshan

AU - Shi, Feng

AU - Qiao, Shuo

AU - Xu, Bowen

AU - Hao, Qun

AU - Song, Ci

AU - Tie, Guipeng

AU - Tian, Ye

AU - Zhai, Dede

AU - Peng, Xing

PY - 2023/9/15

Y1 - 2023/9/15

N2 - Based on optical element’s high precision in-situ measurement requirements, this paper carries out the sensitive factor simulation analysis, studies the influence of systematic structural errors and temperature errors on the measurement results, and designs and builds an in-situ measurement device to carry out measurement experiments of system temperature change, system repeatability and system stability. The results show that the simulation detection model can be used for plane/spherical/aspherical/free surface, the influence on the measurement results is mainly reflected in the low frequency error, the high frequency error is relatively small, the maximum PV value of the measurement surface shape error does not exceed 68nm (about λ/10), and the maximum RMS value does not exceed 15 nm (about λ/40).

AB - Based on optical element’s high precision in-situ measurement requirements, this paper carries out the sensitive factor simulation analysis, studies the influence of systematic structural errors and temperature errors on the measurement results, and designs and builds an in-situ measurement device to carry out measurement experiments of system temperature change, system repeatability and system stability. The results show that the simulation detection model can be used for plane/spherical/aspherical/free surface, the influence on the measurement results is mainly reflected in the low frequency error, the high frequency error is relatively small, the maximum PV value of the measurement surface shape error does not exceed 68nm (about λ/10), and the maximum RMS value does not exceed 15 nm (about λ/40).

KW - error analysis

KW - in-situ measurement

KW - optical element

KW - shape measurement

KW - simulation model

UR - https://www.scopus.com/pages/publications/85171272404

U2 - 10.11884/HPLPB202335.220405

DO - 10.11884/HPLPB202335.220405

M3 - 文章

AN - SCOPUS:85171272404

SN - 1001-4322

VL - 35

JO - Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams

JF - Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams

IS - 9

M1 - 091002

ER -

强光元件逆向哈特曼在位检测装置误差敏感因素分析与验证

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