Wafer map Anomaly Detection Driven by Contrast Learning and Vision Transformer Model

  • Zhonghao Chang
  • , Kaiyuan Chen
  • , Te Han*
  • , Jiajia Xu
  • , Ke Feng
  • , He Li
  • *Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Citation (Scopus)

Abstract

With the rapid development of the integrated circuit industry, wafers, as the carrier for chip manufacturing, have made their production efficiency and quality the focal point of industry attention. Therefore, timely anomaly detection on wafer maps holds significant importance. Wafer maps provide a visual representation of the test results of each die on the wafer and effectively present data along with its associated spatial information. Timely anomaly detection on these maps is crucial for enhancing product quality and production efficiency. This paper introduces an anomaly detection method for wafer maps that leverages the Vision Transformer (ViT) architecture and a contrastive learning mechanism. The ViT architecture is employed to deeply model the global information of wafer maps, followed by the use of a contrastive learning mechanism to capture key features that reflect healthy information in samples of healthy wafer maps. This method not only achieves leading performance but also demonstrates robust resilience under noisy and sample contamination conditions. This achievement provides strong support for the practical application of anomaly detection in wafer maps.

Original languageEnglish
Title of host publication15th Global Reliability and Prognostics and Health Management Conference, PHM-Beijing 2024
EditorsHuimin Wang, Steven Li
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9798350354010
DOIs
Publication statusPublished - 2024
Event15th IEEE Global Reliability and Prognostics and Health Management Conference, PHM-Beijing 2024 - Beijing, China
Duration: 11 Oct 202413 Oct 2024

Publication series

Name15th Global Reliability and Prognostics and Health Management Conference, PHM-Beijing 2024

Conference

Conference15th IEEE Global Reliability and Prognostics and Health Management Conference, PHM-Beijing 2024
Country/TerritoryChina
CityBeijing
Period11/10/2413/10/24

Keywords

  • Anomaly detection
  • Domain generalization
  • Vision Transformer
  • Wafer map
  • component
  • contrastive learning

Fingerprint

Dive into the research topics of 'Wafer map Anomaly Detection Driven by Contrast Learning and Vision Transformer Model'. Together they form a unique fingerprint.

Cite this