Vibration piezoelectric energy harvester with multi-beam

Yan Cui; Qunying Zhang; Minglei Yao; Weijie Dong; Shiqiao Gao

doi:10.1063/1.4919049

Vibration piezoelectric energy harvester with multi-beam

Yan Cui^*
, Qunying Zhang
, Minglei Yao
, Weijie Dong
, Shiqiao Gao

^*Corresponding author for this work

School of Mechatronical Engineering

Dalian University of Technology

Research output: Contribution to journal › Article › peer-review

26 Citations (Scopus)

Abstract

This work presents a novel vibration piezoelectric energy harvester, which is a micro piezoelectric cantilever with multi-beam. The characteristics of the PZT (Pb(Zr_0.53Ti_0.47)O₃) thin film were measured; XRD (X-ray diffraction) pattern and AFM (Atomic Force Microscope) image of the PZT thin film were measured, and show that the PZT (Pb(Zr_0.53Ti_0.47)O₃) thin film is highly (110) crystal oriented; the leakage current is maintained in nA magnitude, the residual polarisation Pr is 37.037 μC/cm², the coercive field voltage Ec is 27.083 kV/cm, and the piezoelectric constant d₃₃ is 28 pC/N. In order to test the dynamic performance of the energy harvester, a new measuring system was set up. The maximum output voltage of the single beam of the multi-beam can achieve 80.78 mV under an acceleration of 1 g at 260 Hz of frequency; the maximum output voltage of the single beam of the multi-beam is almost 20 mV at 1400 Hz frequency.

Original language	English
Article number	041332
Journal	AIP Advances
Volume	5
Issue number	4
DOIs	https://doi.org/10.1063/1.4919049
Publication status	Published - 1 Apr 2015

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title = "Vibration piezoelectric energy harvester with multi-beam",

abstract = "This work presents a novel vibration piezoelectric energy harvester, which is a micro piezoelectric cantilever with multi-beam. The characteristics of the PZT (Pb(Zr0.53Ti0.47)O3) thin film were measured; XRD (X-ray diffraction) pattern and AFM (Atomic Force Microscope) image of the PZT thin film were measured, and show that the PZT (Pb(Zr0.53Ti0.47)O3) thin film is highly (110) crystal oriented; the leakage current is maintained in nA magnitude, the residual polarisation Pr is 37.037 μC/cm2, the coercive field voltage Ec is 27.083 kV/cm, and the piezoelectric constant d33 is 28 pC/N. In order to test the dynamic performance of the energy harvester, a new measuring system was set up. The maximum output voltage of the single beam of the multi-beam can achieve 80.78 mV under an acceleration of 1 g at 260 Hz of frequency; the maximum output voltage of the single beam of the multi-beam is almost 20 mV at 1400 Hz frequency.",

author = "Yan Cui and Qunying Zhang and Minglei Yao and Weijie Dong and Shiqiao Gao",

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doi = "10.1063/1.4919049",

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AU - Cui, Yan

AU - Zhang, Qunying

AU - Yao, Minglei

AU - Dong, Weijie

AU - Gao, Shiqiao

PY - 2015/4/1

Y1 - 2015/4/1

N2 - This work presents a novel vibration piezoelectric energy harvester, which is a micro piezoelectric cantilever with multi-beam. The characteristics of the PZT (Pb(Zr0.53Ti0.47)O3) thin film were measured; XRD (X-ray diffraction) pattern and AFM (Atomic Force Microscope) image of the PZT thin film were measured, and show that the PZT (Pb(Zr0.53Ti0.47)O3) thin film is highly (110) crystal oriented; the leakage current is maintained in nA magnitude, the residual polarisation Pr is 37.037 μC/cm2, the coercive field voltage Ec is 27.083 kV/cm, and the piezoelectric constant d33 is 28 pC/N. In order to test the dynamic performance of the energy harvester, a new measuring system was set up. The maximum output voltage of the single beam of the multi-beam can achieve 80.78 mV under an acceleration of 1 g at 260 Hz of frequency; the maximum output voltage of the single beam of the multi-beam is almost 20 mV at 1400 Hz frequency.

AB - This work presents a novel vibration piezoelectric energy harvester, which is a micro piezoelectric cantilever with multi-beam. The characteristics of the PZT (Pb(Zr0.53Ti0.47)O3) thin film were measured; XRD (X-ray diffraction) pattern and AFM (Atomic Force Microscope) image of the PZT thin film were measured, and show that the PZT (Pb(Zr0.53Ti0.47)O3) thin film is highly (110) crystal oriented; the leakage current is maintained in nA magnitude, the residual polarisation Pr is 37.037 μC/cm2, the coercive field voltage Ec is 27.083 kV/cm, and the piezoelectric constant d33 is 28 pC/N. In order to test the dynamic performance of the energy harvester, a new measuring system was set up. The maximum output voltage of the single beam of the multi-beam can achieve 80.78 mV under an acceleration of 1 g at 260 Hz of frequency; the maximum output voltage of the single beam of the multi-beam is almost 20 mV at 1400 Hz frequency.

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SN - 2158-3226

VL - 5

JO - AIP Advances

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M1 - 041332

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Vibration piezoelectric energy harvester with multi-beam

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