Fingerprint
Dive into the research topics of 'Vertical comb-finger capacitive actuation and sensing for CMOS-MEMS'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Vertical comb-finger capacitive actuation and sensing for CMOS-MEMS
Huikai Xie*, Gary K. Fedder
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
87
Citations
(Scopus)