Two-stage decoupled micro-machined gyroscope and noncontact vibration test

Yao Fenglin; Gao Shiqiao; Zhao Jie; Liu Haipeng; Niu Shaohua; Jin Lei

doi:10.1177/1740349913495014

Two-stage decoupled micro-machined gyroscope and noncontact vibration test

Yao Fenglin^*
, Gao Shiqiao
, Zhao Jie
, Liu Haipeng
, Niu Shaohua
, Jin Lei

^*Corresponding author for this work

School of Mechatronical Engineering

Taiyuan University of Science and Technology
Beijing Institute of Technology
Taiyuan University of Technology

Research output: Contribution to journal › Article › peer-review

Abstract

By introducing the working principle of the two-stage decoupled micro-machined gyroscope, the vibration equation of the driving mode is established. Using Laplace transform, the differential equation and the analytical solution are solved, and the amplitude-frequency characteristics of the driving mode are obtained. Moreover, this article introduces the hardware of the noncontact vibration measurement system and the algorithm. By experiments, the characteristic of vibration of the tested micro-machined gyroscope is obtained. Experimental results indicate that the precision of the amplitude is 0.1μm, and the two-stage decoupled micro-machined gyroscope is immune to mechanical coupling and has high linearity inherently.

Original language	English
Pages (from-to)	139-145
Number of pages	7
Journal	Proceedings of the Institution of Mechanical Engineers, Part N: Journal of Nanoengineering and Nanosystems
Volume	228
Issue number	3
DOIs	https://doi.org/10.1177/1740349913495014
Publication status	Published - 1 Jan 2014

Keywords

Decoupling
Measurement
Micro-machined gyroscope
Noncontact
Vibration

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10.1177/1740349913495014

Cite this

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title = "Two-stage decoupled micro-machined gyroscope and noncontact vibration test",

abstract = "By introducing the working principle of the two-stage decoupled micro-machined gyroscope, the vibration equation of the driving mode is established. Using Laplace transform, the differential equation and the analytical solution are solved, and the amplitude-frequency characteristics of the driving mode are obtained. Moreover, this article introduces the hardware of the noncontact vibration measurement system and the algorithm. By experiments, the characteristic of vibration of the tested micro-machined gyroscope is obtained. Experimental results indicate that the precision of the amplitude is 0.1μm, and the two-stage decoupled micro-machined gyroscope is immune to mechanical coupling and has high linearity inherently.",

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author = "Yao Fenglin and Gao Shiqiao and Zhao Jie and Liu Haipeng and Niu Shaohua and Jin Lei",

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T1 - Two-stage decoupled micro-machined gyroscope and noncontact vibration test

AU - Fenglin, Yao

AU - Shiqiao, Gao

AU - Jie, Zhao

AU - Haipeng, Liu

AU - Shaohua, Niu

AU - Lei, Jin

N1 - Publisher Copyright: © IMechE 2013.

PY - 2014/1/1

Y1 - 2014/1/1

N2 - By introducing the working principle of the two-stage decoupled micro-machined gyroscope, the vibration equation of the driving mode is established. Using Laplace transform, the differential equation and the analytical solution are solved, and the amplitude-frequency characteristics of the driving mode are obtained. Moreover, this article introduces the hardware of the noncontact vibration measurement system and the algorithm. By experiments, the characteristic of vibration of the tested micro-machined gyroscope is obtained. Experimental results indicate that the precision of the amplitude is 0.1μm, and the two-stage decoupled micro-machined gyroscope is immune to mechanical coupling and has high linearity inherently.

AB - By introducing the working principle of the two-stage decoupled micro-machined gyroscope, the vibration equation of the driving mode is established. Using Laplace transform, the differential equation and the analytical solution are solved, and the amplitude-frequency characteristics of the driving mode are obtained. Moreover, this article introduces the hardware of the noncontact vibration measurement system and the algorithm. By experiments, the characteristic of vibration of the tested micro-machined gyroscope is obtained. Experimental results indicate that the precision of the amplitude is 0.1μm, and the two-stage decoupled micro-machined gyroscope is immune to mechanical coupling and has high linearity inherently.

KW - Decoupling

KW - Measurement

KW - Micro-machined gyroscope

KW - Noncontact

KW - Vibration

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JO - Proceedings of the Institution of Mechanical Engineers, Part N: Journal of Nanoengineering and Nanosystems

JF - Proceedings of the Institution of Mechanical Engineers, Part N: Journal of Nanoengineering and Nanosystems

IS - 3

ER -

Two-stage decoupled micro-machined gyroscope and noncontact vibration test

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Keywords

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