Two-axis scanning micromirror based on a tilt-and-lateral shift-free piezoelectric actuator

Wenjing Liu; Yiping Zhu; Jiping Li; A. S. Virendrapal; Yongming Tang; Baoping Wang; Huikai Xie

doi:10.1109/ICSENS.2010.5690601

Two-axis scanning micromirror based on a tilt-and-lateral shift-free piezoelectric actuator

Wenjing Liu^*, Yiping Zhu, Jiping Li, A. S. Virendrapal, Yongming Tang, Baoping Wang, Huikai Xie

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

9 Citations (Scopus)

Abstract

This paper presents a 2-axis scanning piezoelectric micromirror with zero initial tilt and no lateral shift during scanning. The piezoelectric material is a sol-gel PZT with a Zr/Ti ratio of 53/47. The unimorph PZT actuation beams consist of Pt/Ti/PZT/Pt/Ti/SiO2 thin-film layers, which are released via undercutting the substrate silicon. Two-dimensional scans with a 4.8° scan range have been demonstrated at 2 V at 635 Hz (resonance).

Original language	English
Title of host publication	IEEE Sensors 2010 Conference, SENSORS 2010
Pages	2189-2192
Number of pages	4
DOIs	https://doi.org/10.1109/ICSENS.2010.5690601
Publication status	Published - 2010
Externally published	Yes
Event	9th IEEE Sensors Conference 2010, SENSORS 2010 - Waikoloa, HI, United States Duration: 1 Nov 2010 → 4 Nov 2010

Publication series

Name	Proceedings of IEEE Sensors

Conference

Conference	9th IEEE Sensors Conference 2010, SENSORS 2010
Country/Territory	United States
City	Waikoloa, HI
Period	1/11/10 → 4/11/10

Keywords

PZT
Piezoelectric actuator
Piston motion
Scanning micromirror
Two-axis
Zero initial tilt

Access to Document

10.1109/ICSENS.2010.5690601

Cite this

@inproceedings{f36ce1224d7f44f28ab022aecb882a94,

title = "Two-axis scanning micromirror based on a tilt-and-lateral shift-free piezoelectric actuator",

abstract = "This paper presents a 2-axis scanning piezoelectric micromirror with zero initial tilt and no lateral shift during scanning. The piezoelectric material is a sol-gel PZT with a Zr/Ti ratio of 53/47. The unimorph PZT actuation beams consist of Pt/Ti/PZT/Pt/Ti/SiO2 thin-film layers, which are released via undercutting the substrate silicon. Two-dimensional scans with a 4.8° scan range have been demonstrated at 2 V at 635 Hz (resonance).",

keywords = "PZT, Piezoelectric actuator, Piston motion, Scanning micromirror, Two-axis, Zero initial tilt",

author = "Wenjing Liu and Yiping Zhu and Jiping Li and Virendrapal, \{A. S.\} and Yongming Tang and Baoping Wang and Huikai Xie",

year = "2010",

doi = "10.1109/ICSENS.2010.5690601",

language = "English",

isbn = "9781424481682",

series = "Proceedings of IEEE Sensors",

pages = "2189--2192",

booktitle = "IEEE Sensors 2010 Conference, SENSORS 2010",

note = "9th IEEE Sensors Conference 2010, SENSORS 2010 ; Conference date: 01-11-2010 Through 04-11-2010",

}

Liu, W, Zhu, Y, Li, J, Virendrapal, AS, Tang, Y, Wang, B & Xie, H 2010, Two-axis scanning micromirror based on a tilt-and-lateral shift-free piezoelectric actuator. in IEEE Sensors 2010 Conference, SENSORS 2010., 5690601, Proceedings of IEEE Sensors, pp. 2189-2192, 9th IEEE Sensors Conference 2010, SENSORS 2010, Waikoloa, HI, United States, 1/11/10. https://doi.org/10.1109/ICSENS.2010.5690601

TY - GEN

T1 - Two-axis scanning micromirror based on a tilt-and-lateral shift-free piezoelectric actuator

AU - Liu, Wenjing

AU - Zhu, Yiping

AU - Li, Jiping

AU - Virendrapal, A. S.

AU - Tang, Yongming

AU - Wang, Baoping

AU - Xie, Huikai

PY - 2010

Y1 - 2010

N2 - This paper presents a 2-axis scanning piezoelectric micromirror with zero initial tilt and no lateral shift during scanning. The piezoelectric material is a sol-gel PZT with a Zr/Ti ratio of 53/47. The unimorph PZT actuation beams consist of Pt/Ti/PZT/Pt/Ti/SiO2 thin-film layers, which are released via undercutting the substrate silicon. Two-dimensional scans with a 4.8° scan range have been demonstrated at 2 V at 635 Hz (resonance).

AB - This paper presents a 2-axis scanning piezoelectric micromirror with zero initial tilt and no lateral shift during scanning. The piezoelectric material is a sol-gel PZT with a Zr/Ti ratio of 53/47. The unimorph PZT actuation beams consist of Pt/Ti/PZT/Pt/Ti/SiO2 thin-film layers, which are released via undercutting the substrate silicon. Two-dimensional scans with a 4.8° scan range have been demonstrated at 2 V at 635 Hz (resonance).

KW - PZT

KW - Piezoelectric actuator

KW - Piston motion

KW - Scanning micromirror

KW - Two-axis

KW - Zero initial tilt

UR - https://www.scopus.com/pages/publications/79951909454

U2 - 10.1109/ICSENS.2010.5690601

DO - 10.1109/ICSENS.2010.5690601

M3 - Conference contribution

AN - SCOPUS:79951909454

SN - 9781424481682

T3 - Proceedings of IEEE Sensors

SP - 2189

EP - 2192

BT - IEEE Sensors 2010 Conference, SENSORS 2010

T2 - 9th IEEE Sensors Conference 2010, SENSORS 2010

Y2 - 1 November 2010 through 4 November 2010

ER -

Two-axis scanning micromirror based on a tilt-and-lateral shift-free piezoelectric actuator

Abstract

Publication series

Conference

Keywords

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