Two-axis asymmetric electrothermal MEMS micromirror for decoupled resonant scanning

Teng Pan; Jiaan Jin; Yi Li; Xiaodan Mao; Tailong Liu; Hengzahgn Yang; Wenlong Jiao; Hui Zhao; Qian Chen; Huikai Xie

doi:10.1364/OE.554886

Two-axis asymmetric electrothermal MEMS micromirror for decoupled resonant scanning

Teng Pan, Jiaan Jin, Yi Li, Xiaodan Mao, Tailong Liu, Hengzahgn Yang, Wenlong Jiao, Hui Zhao, Qian Chen, Huikai Xie^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

Abstract

Electrothermally-actuated two-axis scanning microelectromechanical system (MEMS) micromirrors have gained significant attention in the field of optical endomicroscopy for their large scan range at low driving voltages. However, significant coupling between the two axes when actuated at resonance poses a challenge. In this work, an asymmetric two-axis electrothermal MEMS micromirror design is proposed to realize decoupled two-axis resonant scanning. The decoupled micromirror has been successfully fabricated. Experiments show that this new electrothermal micromirror can generate a distortion-free Lissajous pattern, achieving a frame rate of 30 fps and an optical field of view (FOV) larger than 21°×22° driven at only 2 V_pp. Compared to its symmetric counterparts, this decoupled micromirror reduces the degree of coupling by one order of magnitude, making it a great fit in advanced endoscopic medical imaging applications that demand high imaging speed, large FOV, and safe driving voltage.

Original language	English
Pages (from-to)	17053-17067
Number of pages	15
Journal	Optics Express
Volume	33
Issue number	8
DOIs	https://doi.org/10.1364/OE.554886
Publication status	Published - 21 Apr 2025
Externally published	Yes

Access to Document

10.1364/OE.554886

Cite this

@article{3f6c8512b12b41ae84a0de12f1d855de,

title = "Two-axis asymmetric electrothermal MEMS micromirror for decoupled resonant scanning",

abstract = "Electrothermally-actuated two-axis scanning microelectromechanical system (MEMS) micromirrors have gained significant attention in the field of optical endomicroscopy for their large scan range at low driving voltages. However, significant coupling between the two axes when actuated at resonance poses a challenge. In this work, an asymmetric two-axis electrothermal MEMS micromirror design is proposed to realize decoupled two-axis resonant scanning. The decoupled micromirror has been successfully fabricated. Experiments show that this new electrothermal micromirror can generate a distortion-free Lissajous pattern, achieving a frame rate of 30 fps and an optical field of view (FOV) larger than 21°×22° driven at only 2 Vpp. Compared to its symmetric counterparts, this decoupled micromirror reduces the degree of coupling by one order of magnitude, making it a great fit in advanced endoscopic medical imaging applications that demand high imaging speed, large FOV, and safe driving voltage.",

author = "Teng Pan and Jiaan Jin and Yi Li and Xiaodan Mao and Tailong Liu and Hengzahgn Yang and Wenlong Jiao and Hui Zhao and Qian Chen and Huikai Xie",

note = "Publisher Copyright: {\textcopyright} 2025 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement.",

year = "2025",

month = apr,

day = "21",

doi = "10.1364/OE.554886",

language = "English",

volume = "33",

pages = "17053--17067",

journal = "Optics Express",

issn = "1094-4087",

publisher = "Optica Publishing Group",

number = "8",

}

TY - JOUR

T1 - Two-axis asymmetric electrothermal MEMS micromirror for decoupled resonant scanning

AU - Pan, Teng

AU - Jin, Jiaan

AU - Li, Yi

AU - Mao, Xiaodan

AU - Liu, Tailong

AU - Yang, Hengzahgn

AU - Jiao, Wenlong

AU - Zhao, Hui

AU - Chen, Qian

AU - Xie, Huikai

PY - 2025/4/21

Y1 - 2025/4/21

N2 - Electrothermally-actuated two-axis scanning microelectromechanical system (MEMS) micromirrors have gained significant attention in the field of optical endomicroscopy for their large scan range at low driving voltages. However, significant coupling between the two axes when actuated at resonance poses a challenge. In this work, an asymmetric two-axis electrothermal MEMS micromirror design is proposed to realize decoupled two-axis resonant scanning. The decoupled micromirror has been successfully fabricated. Experiments show that this new electrothermal micromirror can generate a distortion-free Lissajous pattern, achieving a frame rate of 30 fps and an optical field of view (FOV) larger than 21°×22° driven at only 2 Vpp. Compared to its symmetric counterparts, this decoupled micromirror reduces the degree of coupling by one order of magnitude, making it a great fit in advanced endoscopic medical imaging applications that demand high imaging speed, large FOV, and safe driving voltage.

AB - Electrothermally-actuated two-axis scanning microelectromechanical system (MEMS) micromirrors have gained significant attention in the field of optical endomicroscopy for their large scan range at low driving voltages. However, significant coupling between the two axes when actuated at resonance poses a challenge. In this work, an asymmetric two-axis electrothermal MEMS micromirror design is proposed to realize decoupled two-axis resonant scanning. The decoupled micromirror has been successfully fabricated. Experiments show that this new electrothermal micromirror can generate a distortion-free Lissajous pattern, achieving a frame rate of 30 fps and an optical field of view (FOV) larger than 21°×22° driven at only 2 Vpp. Compared to its symmetric counterparts, this decoupled micromirror reduces the degree of coupling by one order of magnitude, making it a great fit in advanced endoscopic medical imaging applications that demand high imaging speed, large FOV, and safe driving voltage.

UR - http://www.scopus.com/inward/record.url?scp=105003047094&partnerID=8YFLogxK

U2 - 10.1364/OE.554886

DO - 10.1364/OE.554886

M3 - Article

AN - SCOPUS:105003047094

SN - 1094-4087

VL - 33

SP - 17053

EP - 17067

JO - Optics Express

JF - Optics Express

IS - 8

ER -

Two-axis asymmetric electrothermal MEMS micromirror for decoupled resonant scanning

Abstract

Access to Document

Other files and links

Fingerprint

Cite this