Triaxial MEMS Gyroscopes: A Review

Wenqiang Wei; Huimin Tian; Kai Chen; Feifei Wang; Zhenghao Lu; Fang Chen; Huiliang Cao; Huikai Xie

doi:10.1109/JSEN.2025.3599064

Triaxial MEMS Gyroscopes: A Review

Wenqiang Wei, Huimin Tian, Kai Chen, Feifei Wang, Zhenghao Lu, Fang Chen, Huiliang Cao^*, Huikai Xie

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

As a fundamental component of inertial measurement, micro-electromechanical systems (MEMS) gyroscopes are extensively utilized in industrial robotics, drones, and personal navigation systems. Triaxial MEMS gyroscopes, capable of simultaneously measuring angular rates along three axes and providing 3-D orientation, have garnered significant attention in recent years. This article presents three contemporary integration methods for triaxial MEMS gyroscopes: 3-D integration of three single-axis gyroscopes, the monolithic single-structure triaxial gyroscope, and the monolithic multistructure gyroscope array. Furthermore, the methods are compared and analyzed, discussing their respective advantages and disadvantages, while the future applications and development trends of triaxial MEMS gyroscopes are explored.

Original language	English
Pages (from-to)	35687-35707
Number of pages	21
Journal	IEEE Sensors Journal
Volume	25
Issue number	19
DOIs	https://doi.org/10.1109/JSEN.2025.3599064
Publication status	Published - 2025
Externally published	Yes

Keywords

3-D integration
gyroscope array
micro-electromechanical systems (MEMS) gyroscope
monolithic structure
triaxial MEMS gyroscope

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10.1109/JSEN.2025.3599064

Cite this

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title = "Triaxial MEMS Gyroscopes: A Review",

abstract = "As a fundamental component of inertial measurement, micro-electromechanical systems (MEMS) gyroscopes are extensively utilized in industrial robotics, drones, and personal navigation systems. Triaxial MEMS gyroscopes, capable of simultaneously measuring angular rates along three axes and providing 3-D orientation, have garnered significant attention in recent years. This article presents three contemporary integration methods for triaxial MEMS gyroscopes: 3-D integration of three single-axis gyroscopes, the monolithic single-structure triaxial gyroscope, and the monolithic multistructure gyroscope array. Furthermore, the methods are compared and analyzed, discussing their respective advantages and disadvantages, while the future applications and development trends of triaxial MEMS gyroscopes are explored.",

keywords = "3-D integration, gyroscope array, micro-electromechanical systems (MEMS) gyroscope, monolithic structure, triaxial MEMS gyroscope",

author = "Wenqiang Wei and Huimin Tian and Kai Chen and Feifei Wang and Zhenghao Lu and Fang Chen and Huiliang Cao and Huikai Xie",

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year = "2025",

doi = "10.1109/JSEN.2025.3599064",

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T2 - A Review

AU - Wei, Wenqiang

AU - Tian, Huimin

AU - Chen, Kai

AU - Wang, Feifei

AU - Lu, Zhenghao

AU - Chen, Fang

AU - Cao, Huiliang

AU - Xie, Huikai

PY - 2025

Y1 - 2025

N2 - As a fundamental component of inertial measurement, micro-electromechanical systems (MEMS) gyroscopes are extensively utilized in industrial robotics, drones, and personal navigation systems. Triaxial MEMS gyroscopes, capable of simultaneously measuring angular rates along three axes and providing 3-D orientation, have garnered significant attention in recent years. This article presents three contemporary integration methods for triaxial MEMS gyroscopes: 3-D integration of three single-axis gyroscopes, the monolithic single-structure triaxial gyroscope, and the monolithic multistructure gyroscope array. Furthermore, the methods are compared and analyzed, discussing their respective advantages and disadvantages, while the future applications and development trends of triaxial MEMS gyroscopes are explored.

AB - As a fundamental component of inertial measurement, micro-electromechanical systems (MEMS) gyroscopes are extensively utilized in industrial robotics, drones, and personal navigation systems. Triaxial MEMS gyroscopes, capable of simultaneously measuring angular rates along three axes and providing 3-D orientation, have garnered significant attention in recent years. This article presents three contemporary integration methods for triaxial MEMS gyroscopes: 3-D integration of three single-axis gyroscopes, the monolithic single-structure triaxial gyroscope, and the monolithic multistructure gyroscope array. Furthermore, the methods are compared and analyzed, discussing their respective advantages and disadvantages, while the future applications and development trends of triaxial MEMS gyroscopes are explored.

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KW - gyroscope array

KW - micro-electromechanical systems (MEMS) gyroscope

KW - monolithic structure

KW - triaxial MEMS gyroscope

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DO - 10.1109/JSEN.2025.3599064

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JO - IEEE Sensors Journal

JF - IEEE Sensors Journal

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Triaxial MEMS Gyroscopes: A Review

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