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Tri-Eapiezo Crawler: A Mems-Based Tripedal Microrobot Featuring PVDF Actuators and EA Pads for Agile Navigation

  • Yingzhi Wang
  • , Weianliang Wang
  • , Xinyu Ding
  • , Xiaoyi Wang*
  • , Hong Ding*
  • , Jin Xie*
  • *Corresponding author for this work
  • Zhejiang University
  • Beijing Institute of Technology

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

This work present a tripedal microrobot integrating polyvinylidene fluoride (PVDF) actuators and electroadhesive (EA) pads (Tri-EAPiezo Crawler), capable of achieving linear locomotion on flat surfaces and multimode turning at various angles. The robot offers several key advantages: (a) A MEMS fabrication process enables the PVDF actuators to deliver enhanced deformation and output force; (b) Compared to electro-responsive actuators such as dielectric elastomers (DEs), the system operates at a driving voltage below 1.5 kV with a low power consumption of 682 μ W/ cm2; (c) The robot is capable of achieving rapid crawling speed (0.8 BL/ s) and turning speeds (3.27 rad/ s); and (d) The microrobot exhibits robust environmental adaptability and a diverse repertoire of turning modes, allowing agile navigation across a variety of terrain conditions and making it well-suited for exploration of unknown and confined spaces.

Original languageEnglish
Title of host publication2026 IEEE 39th International Conference on Micro Electro Mechanical Systems, MEMS 2026
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages970-973
Number of pages4
ISBN (Electronic)9798331572518
DOIs
Publication statusPublished - 2026
Externally publishedYes
Event39th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2026 - Salzburg, Austria
Duration: 25 Jan 202629 Jan 2026

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Conference

Conference39th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2026
Country/TerritoryAustria
CitySalzburg
Period25/01/2629/01/26

Keywords

  • EA pad
  • PVDF actuator
  • Soft robot
  • tripedal robot

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