Trench-filled cellular parylene structure for piezoelectric polymer electret

Y. Feng; K. Hagiwara; Y. Iguchi; Y. Suzuki

doi:10.1109/MEMSYS.2012.6170376

Trench-filled cellular parylene structure for piezoelectric polymer electret

Y. Feng^*, K. Hagiwara, Y. Iguchi, Y. Suzuki

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

In this paper, we report a novel cellular polymer electret based on trench-filled parylene, and demonstrate its performance for low-resonant- frequency in-plane electromechanical transducer. Cellular parylene structures with 15 μm-wide beams have been successfully microfabricated, and charges are implanted onto the vertical walls with soft X-ray charging as artificial dipoles. The dipole moments are changed due to the cellular gap extension/shrinkage, producing voltage across the cellular structures. With our early prototype, 0.116 Vp-p output has been obtained at 28 Hz and 1 G acceleration, showing the feasibility of MEMS-based multi-layer cellular polymer electrets for in-plane piezoelectric transducers.

Original language	English
Title of host publication	2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Pages	1189-1192
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2012.6170376
Publication status	Published - 2012
Externally published	Yes
Event	2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 - Paris, France Duration: 29 Jan 2012 → 2 Feb 2012

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Conference

Conference	2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Country/Territory	France
City	Paris
Period	29/01/12 → 2/02/12

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10.1109/MEMSYS.2012.6170376

Cite this

Feng, Y., Hagiwara, K., Iguchi, Y., & Suzuki, Y. (2012). Trench-filled cellular parylene structure for piezoelectric polymer electret. In 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 (pp. 1189-1192). Article 6170376 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2012.6170376

@inproceedings{4219a06426aa4bd98b0ebbbec8b8203e,

title = "Trench-filled cellular parylene structure for piezoelectric polymer electret",

abstract = "In this paper, we report a novel cellular polymer electret based on trench-filled parylene, and demonstrate its performance for low-resonant- frequency in-plane electromechanical transducer. Cellular parylene structures with 15 μm-wide beams have been successfully microfabricated, and charges are implanted onto the vertical walls with soft X-ray charging as artificial dipoles. The dipole moments are changed due to the cellular gap extension/shrinkage, producing voltage across the cellular structures. With our early prototype, 0.116 Vp-p output has been obtained at 28 Hz and 1 G acceleration, showing the feasibility of MEMS-based multi-layer cellular polymer electrets for in-plane piezoelectric transducers.",

author = "Y. Feng and K. Hagiwara and Y. Iguchi and Y. Suzuki",

year = "2012",

doi = "10.1109/MEMSYS.2012.6170376",

language = "English",

isbn = "9781467303248",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

pages = "1189--1192",

booktitle = "2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012",

note = "2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 ; Conference date: 29-01-2012 Through 02-02-2012",

}

Feng, Y, Hagiwara, K, Iguchi, Y & Suzuki, Y 2012, Trench-filled cellular parylene structure for piezoelectric polymer electret. in 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012., 6170376, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 1189-1192, 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012, Paris, France, 29/01/12. https://doi.org/10.1109/MEMSYS.2012.6170376

Trench-filled cellular parylene structure for piezoelectric polymer electret. / Feng, Y.; Hagiwara, K.; Iguchi, Y. et al.
2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012. 2012. p. 1189-1192 6170376 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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T1 - Trench-filled cellular parylene structure for piezoelectric polymer electret

AU - Feng, Y.

AU - Hagiwara, K.

AU - Iguchi, Y.

AU - Suzuki, Y.

PY - 2012

Y1 - 2012

N2 - In this paper, we report a novel cellular polymer electret based on trench-filled parylene, and demonstrate its performance for low-resonant- frequency in-plane electromechanical transducer. Cellular parylene structures with 15 μm-wide beams have been successfully microfabricated, and charges are implanted onto the vertical walls with soft X-ray charging as artificial dipoles. The dipole moments are changed due to the cellular gap extension/shrinkage, producing voltage across the cellular structures. With our early prototype, 0.116 Vp-p output has been obtained at 28 Hz and 1 G acceleration, showing the feasibility of MEMS-based multi-layer cellular polymer electrets for in-plane piezoelectric transducers.

AB - In this paper, we report a novel cellular polymer electret based on trench-filled parylene, and demonstrate its performance for low-resonant- frequency in-plane electromechanical transducer. Cellular parylene structures with 15 μm-wide beams have been successfully microfabricated, and charges are implanted onto the vertical walls with soft X-ray charging as artificial dipoles. The dipole moments are changed due to the cellular gap extension/shrinkage, producing voltage across the cellular structures. With our early prototype, 0.116 Vp-p output has been obtained at 28 Hz and 1 G acceleration, showing the feasibility of MEMS-based multi-layer cellular polymer electrets for in-plane piezoelectric transducers.

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U2 - 10.1109/MEMSYS.2012.6170376

DO - 10.1109/MEMSYS.2012.6170376

M3 - Conference contribution

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SN - 9781467303248

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 1189

EP - 1192

BT - 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012

T2 - 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012

Y2 - 29 January 2012 through 2 February 2012

ER -

Trench-filled cellular parylene structure for piezoelectric polymer electret

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